Hirofumi Kitayama

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Conductor treating single-wafer type treating device and method for...
- Patent number 7,235,137
- Issue date Jun 26, 2007
- Tokyo Electron Limited
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for feeding gases for use in semiconductor manufacturing
- Patent number 6,360,762
- Issue date Mar 26, 2002
- Fujikin Incorporated
- Hirofumi Kitayama
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Apparatus for feeding gases for use in semiconductor manufacturing
- Patent number 6,210,482
- Issue date Apr 3, 2001
- Fujikin Incorporated
- Hirofumi Kitayama
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Semiconductor wafer boat and vertical heat treating system
- Patent number 6,095,806
- Issue date Aug 1, 2000
- Tokyo Electron Limited
- Shizuo Suzuki
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treating apparatus
- Patent number 5,622,639
- Issue date Apr 22, 1997
- Tokyo Electron Kabushiki Kaisha
- Hirofumi Kitayama
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate transferring apparatus
- Patent number 5,445,486
- Issue date Aug 29, 1995
- Tokyo Electron Sagami Limited
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treating method and device
- Patent number 5,445,521
- Issue date Aug 29, 1995
- Tokyo Electron Kabushiki Kaisha
- Eiji Yamaguchi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical boat used for heat treatment of semiconductor wafer and ve...
- Patent number 5,316,472
- Issue date May 31, 1994
- Tokyo Electron Limited
- Reiji Niino
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical wafer heat treatment apparatus having dual load lock chambers
- Patent number 5,217,501
- Issue date Jun 8, 1993
- Tokyo Electron Limited
- Noboru Fuse
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical heat treatment apparatus having wafer transfer mechanism a...
- Patent number 5,162,047
- Issue date Nov 10, 1992
- Tokyo Electron Sagami Limited
- Atsushi Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical heat-treatment apparatus having a wafer transfer mechanism
- Patent number 5,110,248
- Issue date May 5, 1992
- Tokyo Electron Sagami Limited
- Takanobu Asano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device
- Patent number 5,030,056
- Issue date Jul 9, 1991
- Tokyo Electron Sagami Ltd.
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reaction treatment
- Patent number 4,989,540
- Issue date Feb 5, 1991
- Tel Sagami Limited
- Noboru Fuse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Conductor treating single-wafer type treating device and method for...
- Publication number 20040097088
- Publication date May 20, 2004
- Hirofumi Kitayama
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus and method for feeding gases for use in semiconductor man...
- Publication number 20010013363
- Publication date Aug 16, 2001
- Hirofumi Kitayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hirofumi Kitayama

Person

Patents Grantslast 30 patents

Conductor treating single-wafer type treating device and method for...

Method for feeding gases for use in semiconductor manufacturing

Apparatus for feeding gases for use in semiconductor manufacturing

Semiconductor wafer boat and vertical heat treating system

Heat treating apparatus

Substrate transferring apparatus

Heat treating method and device

Vertical boat used for heat treatment of semiconductor wafer and ve...

Vertical wafer heat treatment apparatus having dual load lock chambers

Vertical heat treatment apparatus having wafer transfer mechanism a...

Vertical heat-treatment apparatus having a wafer transfer mechanism

Substrate transfer device

Apparatus for reaction treatment

Patents Applicationslast 30 patents

Conductor treating single-wafer type treating device and method for...

Apparatus and method for feeding gases for use in semiconductor man...