Claims
- 1. A substrate transferring apparatus for transferring substrates from a substrate transport container containing a plurality of substrates to be treated to a substrate holder for holding a plurality of substrates to be treated or vice versa, said apparatus comprising:
- arms for supporting the substrates, each of said arms having a free end and a fixed end; and
- drive means for driving the arms;
- wherein each of said arms includes:
- a plate-shaped arm main body having a thin portion and a connecting section provided on the fixed end for connecting the arm to said drive means;
- supporting sections having a thickness greater than that of the thin portion of the arm main body for supporting corresponding peripheral areas of the substrate; and
- stoppers having a thickness greater than that of the supporting sections for abutting lateral sides of the substrate to hold the substrate;
- wherein each of said arm main bodies has a hole formed at a central area thereof such that an amount of electric charge on said arms is decreased, each of said arm main bodies also having a dividing section for dividing said hole.
- 2. The apparatus according to claim 1, wherein each of said supporting sections has a thickness large enough to accommodate possible deformation of the substrate.
- 3. The apparatus according to claim 1, wherein each of said stoppers has a thickness at least 60% of the thickness of the substrate.
- 4. The apparatus according to claim 1, wherein each of said supporting sections includes at least one of said stoppers fitted onto the plate-shaped arm main body.
- 5. The apparatus according to claim 4, wherein said supporting sections and said stoppers are blocks rigidly fitted to the corresponding arm main body by a method selected from the group consisting of adhesion and welding.
- 6. The apparatus according to claim 1, wherein each of said arms has at least three blocks with said blocks providing said supporting sections and said stoppers.
- 7. The apparatus according to claim 1, wherein each of said arms is made of a material selected from the group consisting of silicon carbide, alumina and sapphire.
- 8. The apparatus according to claim 1, wherein each of said arms is made of alumina coated with a material selected from the group consisting of silicon carbide and diamond.
- 9. The apparatus according to claim 1, wherein each of said arms is provided with a recess having a plurality of steps, said steps forming a plurality of different supporting section.
Priority Claims (1)
Number |
Date |
Country |
Kind |
4-102153 |
Mar 1992 |
JPX |
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Parent Case Info
This application is Continuation of application Ser. No. 08/038,644, filed on Mar. 29, 1993, now abandoned.
US Referenced Citations (12)
Continuations (1)
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Number |
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Parent |
38644 |
Mar 1993 |
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