Hirohiko Nakata

Person

Itami-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heating device for manufacturing semiconductor
- Patent number 7,999,210
- Issue date Aug 16, 2011
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder for wafer prober and wafer prober equipped with the same
- Patent number 7,855,569
- Issue date Dec 21, 2010
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor processing apparatus with a heat resistant hermetical...
- Patent number 7,837,798
- Issue date Nov 23, 2010
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor or liquid crystal producing device
- Patent number 7,806,984
- Issue date Oct 5, 2010
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding structure and substrate processing device
- Patent number 7,618,494
- Issue date Nov 17, 2009
- Tokyo Electron Limited
- Sumi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder, and wafer prober provided therewith
- Patent number 7,576,303
- Issue date Aug 18, 2009
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- G01 - MEASURING TESTING
Information Patent Grant
Heater unit and semiconductor manufacturing apparatus including the...
- Patent number 7,554,059
- Issue date Jun 30, 2009
- Sumitomo Electric Industries, Ltd.
- Tomoyuki Awazu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Body for keeping a wafer, heater unit and wafer prober
- Patent number 7,495,460
- Issue date Feb 24, 2009
- Sumitomo Electric Industries, Ltd.
- Katsuhiro Itakura
- G01 - MEASURING TESTING
Information Patent Grant
Ceramic susceptor for semiconductor manufacturing equipment
- Patent number 7,491,432
- Issue date Feb 17, 2009
- Sumitomo Electric Industries, Ltd.
- Yoshifumi Kachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Body for keeping a wafer and wafer prober using the same
- Patent number 7,425,838
- Issue date Sep 16, 2008
- Sumitomo Electric Industries, Ltd.
- Katsuhiro Itakura
- G01 - MEASURING TESTING
Information Patent Grant
Holder for use in semiconductor or liquid-crystal manufacturing dev...
- Patent number 7,414,823
- Issue date Aug 19, 2008
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holder and semiconductor manufacturing apparatus
- Patent number 7,408,131
- Issue date Aug 5, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor
- Patent number 7,394,043
- Issue date Jul 1, 2008
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 7,361,230
- Issue date Apr 22, 2008
- Sumitomo Electric Industries, Ltd
- Masuhiro Natsuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum nitride sintered body
- Patent number 7,341,969
- Issue date Mar 11, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater and heating device
- Patent number 7,342,204
- Issue date Mar 11, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Aluminum nitride sintered body
- Patent number 7,306,858
- Issue date Dec 11, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 7,279,048
- Issue date Oct 9, 2007
- Sumitomo Electric Industries, Ltd.
- Kenji Shinma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor heating apparatus
- Patent number 7,268,322
- Issue date Sep 11, 2007
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder and semiconductor manufacturing apparatus
- Patent number 7,268,321
- Issue date Sep 11, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece holder for processing apparatus, and processing apparatus...
- Patent number 7,264,699
- Issue date Sep 4, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic joined body, substrate holding structure and substrate proc...
- Patent number 7,211,153
- Issue date May 1, 2007
- Sumitomo Electric Industries, Ltd
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid heating heater
- Patent number 7,177,536
- Issue date Feb 13, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Heater module for semiconductor manufacturing equipment
- Patent number 7,145,106
- Issue date Dec 5, 2006
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connecting structures
- Patent number 7,090,423
- Issue date Aug 15, 2006
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Temperature gauge and ceramic susceptor in which it is utilized
- Patent number 7,090,394
- Issue date Aug 15, 2006
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- G01 - MEASURING TESTING
Information Patent Grant
Workpiece holder for processing apparatus, and processing apparatus...
- Patent number 7,045,045
- Issue date May 16, 2006
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater module for semiconductor manufacturing equipment
- Patent number 6,963,052
- Issue date Nov 8, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor
- Patent number 6,946,625
- Issue date Sep 20, 2005
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ceramics base plate and method for producing the same
- Patent number 6,881,128
- Issue date Apr 19, 2005
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- B28 - WORKING CEMENT, CLAY, OR STONE

Patents Applicationslast 30 patents

Information Patent Application
HEATER UNIT, HEATING AND COOLING DEVICE, AND APPARATUS COMPRISING SAME
- Publication number 20110139399
- Publication date Jun 16, 2011
- Sumitomo Electric Industries, Ltd.
- Katsuhiro ITAKURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HOLDER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20100242844
- Publication date Sep 30, 2010
- Sumitono Electric Industries, Ltd.
- Akira KUIBIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING UNIT AND THE APPARATUS HAVING THE SAME
- Publication number 20100044364
- Publication date Feb 25, 2010
- Sumitomo Electric Industries, Ltd.
- Akira MIKUMO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
WAFER HOLDER, MANUFACTURING METHOD THEREOF AND SEMICONDUCTOR MANUFA...
- Publication number 20090283034
- Publication date Nov 19, 2009
- Sumitomo Electric Industries, LTD.
- Masuhiro Natsuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device-Fabrication Wafer Holder
- Publication number 20090142479
- Publication date Jun 4, 2009
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TRANSFER MEMBER, CONVEX STRUCTURAL MEMBER, ELECTRONIC APPARATU...
- Publication number 20090126903
- Publication date May 21, 2009
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Wafer holder, heater unit used for wafer prober having the wafer ho...
- Publication number 20090050621
- Publication date Feb 26, 2009
- Tomoyuki Awazu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer holder for wafer prober and wafer prober equipped with same
- Publication number 20090045829
- Publication date Feb 19, 2009
- Sumitomo Electric Industries, Ltd.
- Tomoyuki Awazu
- G01 - MEASURING TESTING
Information Patent Application
Ceramic base material
- Publication number 20080277841
- Publication date Nov 13, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Wafer holder, heater unit used for wafer prober and having wafer ho...
- Publication number 20080211526
- Publication date Sep 4, 2008
- Kenji Shinma
- G01 - MEASURING TESTING
Information Patent Application
Wafer holder and exposure apparatus equipped with wafer holder
- Publication number 20080083732
- Publication date Apr 10, 2008
- Sumitomo Electric Industries, Ltd.
- Kenji Shinma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer holder and semiconductor manufacturing apparatus equipped wit...
- Publication number 20080083979
- Publication date Apr 10, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Holder for Semiconductor Manufacturing Device and Semiconduct...
- Publication number 20080060576
- Publication date Mar 13, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ceramic base material
- Publication number 20080039312
- Publication date Feb 14, 2008
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
HEATING AND COOLING MODULE
- Publication number 20070215602
- Publication date Sep 20, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wafer holder, and wafer prober provided therewith
- Publication number 20070205788
- Publication date Sep 6, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- G01 - MEASURING TESTING
Information Patent Application
Wafer holder, and heater unit and wafer prober provided therewith
- Publication number 20070205787
- Publication date Sep 6, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- G01 - MEASURING TESTING
Information Patent Application
Wafer holder, and wafer prober and semiconductor manufacturing appa...
- Publication number 20070182433
- Publication date Aug 9, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- G01 - MEASURING TESTING
Information Patent Application
WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCT...
- Publication number 20070173185
- Publication date Jul 26, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluid heating heater
- Publication number 20070133964
- Publication date Jun 14, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- F24 - HEATING RANGES VENTILATING
Information Patent Application
Wafer holder, and heating unit and wafer prober provided with the w...
- Publication number 20070126457
- Publication date Jun 7, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- G01 - MEASURING TESTING
Information Patent Application
Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Dev...
- Publication number 20070095291
- Publication date May 3, 2007
- Sumitomo Electric Industries, Ltd.
- Manabu Hashikura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer holder, heater unit having the wafer holder, and wafer prober...
- Publication number 20070082313
- Publication date Apr 12, 2007
- Katsuhiro Itakura
- G01 - MEASURING TESTING
Information Patent Application
Heater Module for Semiconductor Manufacturing Equipment
- Publication number 20070068921
- Publication date Mar 29, 2007
- Sumitomo Electric Industries, Ltd.
- Akira Kuibira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Composite and susceptor for semiconductor manufacturing device and...
- Publication number 20070069174
- Publication date Mar 29, 2007
- Sumitomo Electric Industries, Ltd.
- Masuhiro Natsuhara
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Heating unit and the apparatus having the same
- Publication number 20070062929
- Publication date Mar 22, 2007
- Akira Mikumo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heating unit and wafer prober having the same
- Publication number 20070056952
- Publication date Mar 15, 2007
- Katsuhiro Itakura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heater unit and semiconductor manufacturing apparatus including the...
- Publication number 20070056953
- Publication date Mar 15, 2007
- SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Tomoyuki Awazu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor heating heater holder and semiconductor manufacturing...
- Publication number 20070054424
- Publication date Mar 8, 2007
- Masuhiro Natsuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer holder, heater unit used for wafer prober having the wafer ho...
- Publication number 20070045778
- Publication date Mar 1, 2007
- Katsuhiro Itakura
- G01 - MEASURING TESTING

Hirohiko Nakata

Person

Patents Grantslast 30 patents

Heating device for manufacturing semiconductor

Wafer holder for wafer prober and wafer prober equipped with the same

Semiconductor processing apparatus with a heat resistant hermetical...

Semiconductor or liquid crystal producing device

Substrate holding structure and substrate processing device

Wafer holder, and wafer prober provided therewith

Heater unit and semiconductor manufacturing apparatus including the...

Body for keeping a wafer, heater unit and wafer prober

Ceramic susceptor for semiconductor manufacturing equipment

Body for keeping a wafer and wafer prober using the same

Holder for use in semiconductor or liquid-crystal manufacturing dev...

Wafer holder and semiconductor manufacturing apparatus

Ceramic susceptor

Substrate processing apparatus

Aluminum nitride sintered body

Heater and heating device

Aluminum nitride sintered body

Semiconductor manufacturing apparatus

Semiconductor heating apparatus

Wafer holder and semiconductor manufacturing apparatus

Workpiece holder for processing apparatus, and processing apparatus...

Ceramic joined body, substrate holding structure and substrate proc...

Fluid heating heater

Heater module for semiconductor manufacturing equipment

Connecting structures

Temperature gauge and ceramic susceptor in which it is utilized

Workpiece holder for processing apparatus, and processing apparatus...

Heater module for semiconductor manufacturing equipment

Ceramic susceptor

Ceramics base plate and method for producing the same

Patents Applicationslast 30 patents

HEATER UNIT, HEATING AND COOLING DEVICE, AND APPARATUS COMPRISING SAME

HOLDER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

HEATING UNIT AND THE APPARATUS HAVING THE SAME

WAFER HOLDER, MANUFACTURING METHOD THEREOF AND SEMICONDUCTOR MANUFA...

Method of Manufacturing Semiconductor Device-Fabrication Wafer Holder

HEAT TRANSFER MEMBER, CONVEX STRUCTURAL MEMBER, ELECTRONIC APPARATU...

Wafer holder, heater unit used for wafer prober having the wafer ho...

Wafer holder for wafer prober and wafer prober equipped with same

Ceramic base material

Wafer holder, heater unit used for wafer prober and having wafer ho...

Wafer holder and exposure apparatus equipped with wafer holder

Wafer holder and semiconductor manufacturing apparatus equipped wit...

Wafer Holder for Semiconductor Manufacturing Device and Semiconduct...

Ceramic base material

HEATING AND COOLING MODULE

Wafer holder, and wafer prober provided therewith

Wafer holder, and heater unit and wafer prober provided therewith

Wafer holder, and wafer prober and semiconductor manufacturing appa...

WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCT...

Fluid heating heater

Wafer holder, and heating unit and wafer prober provided with the w...

Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Dev...

Wafer holder, heater unit having the wafer holder, and wafer prober...

Heater Module for Semiconductor Manufacturing Equipment

Composite and susceptor for semiconductor manufacturing device and...

Heating unit and the apparatus having the same

Heating unit and wafer prober having the same

Heater unit and semiconductor manufacturing apparatus including the...

Semiconductor heating heater holder and semiconductor manufacturing...

Wafer holder, heater unit used for wafer prober having the wafer ho...