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Hirokatsu Kobayashi

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  • Nirasaki, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20190071773
    • Publication date Mar 7, 2019
    • TOKYO ELECTRON LIMITED
    • Masayuki Harashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20100092666
    • Publication date Apr 15, 2010
    • TOKYO ELECTRON LIMITED
    • Eisuke Morisaki
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    FILM FORMING APPARATUS AND METHOD
    • Publication number 20100047448
    • Publication date Feb 25, 2010
    • Tokyo Electron Limited
    • Eisuke Morisaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND METHOD
    • Publication number 20100015359
    • Publication date Jan 21, 2010
    • Tokyo Electron Limited
    • Eisuke Morisaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS, FILM FORMING METHOD, PROGRAM AND STORAGE ME...
    • Publication number 20070204147
    • Publication date Aug 30, 2007
    • TOKYO ELECTRON LIMITED
    • Hirokatsu Kobayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Single wafer processing method and system for processing semiconductor
    • Publication number 20040097063
    • Publication date May 20, 2004
    • Takeshi Sakuma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...