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Ibaraki, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for reducing agglomeration of Si layer, method for manufactu...
Patent number
7,919,397
Issue date
Apr 5, 2011
Canon Anelva Corporation
Junko Nakatsuru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a semiconductor device
Patent number
7,807,585
Issue date
Oct 5, 2010
Canon Anelva Corporation
Takuya Seino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR SELECTIVELY GROWING DOPED EPITAXIAL FILM
Publication number
20120258582
Publication date
Oct 11, 2012
Canon ANELVA Corporation
Takuya SEINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REDUCING AGGLOMERATION OF Si LAYER, METHOD FOR MANUFACTU...
Publication number
20100144127
Publication date
Jun 10, 2010
Canon ANELVA Corporation
Junko Nakatsuru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
Publication number
20100075508
Publication date
Mar 25, 2010
Canon ANELVA Corporation
Takuya Seino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electro-Static Chucking Mechanism and Surface Processing Apparatus
Publication number
20080014363
Publication date
Jan 17, 2008
Canon ANELVA Corporation
Yasumi SAGO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electro-static chucking mechanism and surface processing apparatus
Publication number
20010054389
Publication date
Dec 27, 2001
Yasumi Sago
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...