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Substrate processing device
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Patent number 11,527,426
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Issue date Dec 13, 2022
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Tokyo Electron Limited
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Norihiko Tsuji
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H01 - BASIC ELECTRIC ELEMENTS
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Load-lock chamber
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Patent number D556157
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Issue date Nov 27, 2007
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Tokyo Electron Limited
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Keisuke Kondoh
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D13 - Equipment for production, distribution, or transformation of energy
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Transfer-chamber
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Patent number D527751
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Issue date Sep 5, 2006
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Tokyo Electron Limited
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Keisuke Kondoh
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D15 - Machines not elsewhere specified
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Vacuum processing device
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Patent number 6,932,885
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Issue date Aug 23, 2005
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Tokyo Electron Limited
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Hiroki Oka
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H01 - BASIC ELECTRIC ELEMENTS