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Hiromichi KAWASAKI

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  • Shunan-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 10,522,333
    • Issue date Dec 31, 2019
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing unit
    • Patent number D847237
    • Issue date Apr 30, 2019
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • D15 - Machines not elsewhere specified
  • Information Patent Grant

    Plasma processing apparatus and plasma processing method
    • Patent number 10,128,141
    • Issue date Nov 13, 2018
    • Hitachi High-Technologies Corporation
    • Takumi Tandou
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing unit
    • Patent number D831085
    • Issue date Oct 16, 2018
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • D15 - Machines not elsewhere specified
  • Information Patent Grant

    Substrate processing unit
    • Patent number D831086
    • Issue date Oct 16, 2018
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • D15 - Machines not elsewhere specified
  • Information Patent Grant

    Plasma processing apparatus and plasma processing method
    • Patent number 9,378,929
    • Issue date Jun 28, 2016
    • Hitachi High-Technologies Corporation
    • Kenji Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus and plasma processing method
    • Patent number 8,951,385
    • Issue date Feb 10, 2015
    • Hitachi High-Technologies Corporation
    • Kenji Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSI...
    • Publication number 20190157053
    • Publication date May 23, 2019
    • Hitachi High-Technologies Corporation
    • Ryoichi ISOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THE VACUUM PROCESSING APPARATUS
    • Publication number 20180151336
    • Publication date May 31, 2018
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND SAMPLE STAGE FABRICATING METHOD
    • Publication number 20160027621
    • Publication date Jan 28, 2016
    • Hitachi High-Technologies Corporation
    • Takumi TANDOU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150248994
    • Publication date Sep 3, 2015
    • Hitachi High-Technologies Corporation
    • Takumi TANDOU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20150221477
    • Publication date Aug 6, 2015
    • Hitachi High-Technologies Corporation
    • Kenji MAEDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEAT TREATMENT APPARATUS
    • Publication number 20150156856
    • Publication date Jun 4, 2015
    • Hitachi High-Technologies Corporation
    • Masatoshi MIYAKE
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20150096685
    • Publication date Apr 9, 2015
    • Hitachi High-Technologies Corporation
    • Kohei Sato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEAT TREATMENT APPARATUS
    • Publication number 20140305915
    • Publication date Oct 16, 2014
    • Hitachi High-Technologies Corporation
    • Masatoshi MIYAKE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20140283534
    • Publication date Sep 25, 2014
    • Hitachi High-Technologies Corporation
    • Takumi Tandou
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA HEAT TREATMENT APPARATUS
    • Publication number 20140202995
    • Publication date Jul 24, 2014
    • Hitachi High-Technologies Corporation
    • Masatoshi MIYAKE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEAT TREATMENT APPARATUS
    • Publication number 20140008352
    • Publication date Jan 9, 2014
    • Hitachi High-Technologies Corporation
    • Takashi UEMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20130267098
    • Publication date Oct 10, 2013
    • Kenji MAEDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...