Hironobu HIRATA

Person

Mishima-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method for semiconductor device
- Patent number 9,552,983
- Issue date Jan 24, 2017
- Nuflare Technology, Inc.
- Hironobu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus and method for semiconductor device
- Patent number 9,090,990
- Issue date Jul 28, 2015
- NuFlare Technology, Inc.
- Kunihiko Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor, coating apparatus and coating method using the susceptor
- Patent number 8,795,435
- Issue date Aug 5, 2014
- Kabushiki Kaisha Toshiba
- Shinya Higashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and coating method
- Patent number 8,632,634
- Issue date Jan 21, 2014
- NuFlare Technology, Inc.
- Yoshikazu Moriyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus and method for semiconductor device
- Patent number 8,597,429
- Issue date Dec 3, 2013
- NuFlare Technology, Inc.
- Kunihiko Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition apparatus and support table
- Patent number 8,460,470
- Issue date Jun 11, 2013
- NuFlare Technology, Inc.
- Hironobu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition apparatus and vapor phase deposition method
- Patent number 8,257,499
- Issue date Sep 4, 2012
- NuFlare Technology, Inc.
- Kunihiko Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus for semiconductor device and manufacturing...
- Patent number 7,699,604
- Issue date Apr 20, 2010
- Nuflare Technology, Inc.
- Hideki Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20150228477
- Publication date Aug 13, 2015
- NUFLARE TECHNOLOGY, INC.
- Hironobu HIRATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20120291697
- Publication date Nov 22, 2012
- Kunihiko SUZUKI
- C30 - CRYSTAL GROWTH
Information Patent Application
MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20120184054
- Publication date Jul 19, 2012
- Kunihiko SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Phase Deposition Apparatus and Support Table
- Publication number 20120055406
- Publication date Mar 8, 2012
- NuFLARE TECHNOLOGY, INC.
- Hironobu Hirata
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR, COATING APPARATUS AND COATING METHOD USING THE SUSCEPTOR
- Publication number 20110171380
- Publication date Jul 14, 2011
- Shinya HIGASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR, FILM FORMING APPARATUS AND METHOD
- Publication number 20110120366
- Publication date May 26, 2011
- Shinya HIGASHI
- C30 - CRYSTAL GROWTH
Information Patent Application
MANUFACTURING METHOD AND MANUFACTURING APPARATUS FOR SEMICONDUCTOR...
- Publication number 20100075509
- Publication date Mar 25, 2010
- Hironobu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING APPARATUS AND COATING METHOD
- Publication number 20100021631
- Publication date Jan 28, 2010
- Yoshikazu MORIYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MAN...
- Publication number 20090239362
- Publication date Sep 24, 2009
- Hironobu Hirata
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING EPITAXIAL WAFER
- Publication number 20090194018
- Publication date Aug 6, 2009
- Shinya HIGASHI
- C30 - CRYSTAL GROWTH
Information Patent Application
VAPOR PHASE GROWTH APPARATUS ANS VAPOR PHASE GROWTH METHOD
- Publication number 20090139448
- Publication date Jun 4, 2009
- Hironobu HIRATA
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR, MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE AND MAN...
- Publication number 20090068851
- Publication date Mar 12, 2009
- Hironobu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR-PHASE GROWING APPARATUS AND VAPOR-PHASE GROWING METHOD
- Publication number 20090007841
- Publication date Jan 8, 2009
- Hironobu Hirata
- C30 - CRYSTAL GROWTH
Information Patent Application
VAPOR-PHASE GROWTH APPARATUS AND VAPOR-PHASE GROWTH METHOD
- Publication number 20080311294
- Publication date Dec 18, 2008
- Hideki ITO
- C30 - CRYSTAL GROWTH
Information Patent Application
VAPOR-PHASE GROWTH APPARATUS AND VAPOR-PHASE GROWTH METHOD
- Publication number 20080308036
- Publication date Dec 18, 2008
- Hideki ITO
- C30 - CRYSTAL GROWTH
Information Patent Application
VAPOR PHASE DEPOSITION APPARATUS AND VAPOR PHASE DEPOSITION METHOD
- Publication number 20080193646
- Publication date Aug 14, 2008
- NuFlare Technology, Inc.
- Kunihiko Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE AND MANUFACTURING...
- Publication number 20080032036
- Publication date Feb 7, 2008
- NuFlare Technology, Inc.
- Hideki ITO
- C30 - CRYSTAL GROWTH
Information Patent Application
Vapor phase deposition apparatus and support table
- Publication number 20070204796
- Publication date Sep 6, 2007
- NuFLARE TECHNOLOGY, INC.
- Hironobu Hirata
- C30 - CRYSTAL GROWTH
Information Patent Application
Vapor phase deposition apparatus and vapor phase deposition method
- Publication number 20070026148
- Publication date Feb 1, 2007
- NuFLARE TECHNOLOGY, INC.
- Hideki Arai
- C30 - CRYSTAL GROWTH

Hironobu HIRATA

Person

Patents Grantslast 30 patents

Manufacturing method for semiconductor device

Manufacturing apparatus and method for semiconductor device

Susceptor, coating apparatus and coating method using the susceptor

Coating apparatus and coating method

Manufacturing apparatus and method for semiconductor device

Vapor phase deposition apparatus and support table

Vapor phase deposition apparatus and vapor phase deposition method

Manufacturing apparatus for semiconductor device and manufacturing...

Patents Applicationslast 30 patents

MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE

MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE

Vapor Phase Deposition Apparatus and Support Table

SUSCEPTOR, COATING APPARATUS AND COATING METHOD USING THE SUSCEPTOR

SUSCEPTOR, FILM FORMING APPARATUS AND METHOD

MANUFACTURING METHOD AND MANUFACTURING APPARATUS FOR SEMICONDUCTOR...

COATING APPARATUS AND COATING METHOD

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MAN...

APPARATUS AND METHOD FOR MANUFACTURING EPITAXIAL WAFER

VAPOR PHASE GROWTH APPARATUS ANS VAPOR PHASE GROWTH METHOD

SUSCEPTOR, MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE AND MAN...

VAPOR-PHASE GROWING APPARATUS AND VAPOR-PHASE GROWING METHOD

VAPOR-PHASE GROWTH APPARATUS AND VAPOR-PHASE GROWTH METHOD

VAPOR-PHASE GROWTH APPARATUS AND VAPOR-PHASE GROWTH METHOD

VAPOR PHASE DEPOSITION APPARATUS AND VAPOR PHASE DEPOSITION METHOD

MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE AND MANUFACTURING...

Vapor phase deposition apparatus and support table

Vapor phase deposition apparatus and vapor phase deposition method