Hironobu Hyakutake

Person

Tosu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,915,947
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing meihod
- Patent number 11,232,959
- Issue date Jan 25, 2022
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,087,992
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Tsukasa Hirayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,075,096
- Issue date Jul 27, 2021
- Tokyo Electron Limited
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,928,732
- Issue date Feb 23, 2021
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,916,456
- Issue date Feb 9, 2021
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,840,081
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,458,010
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Hironobu Hyakutake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for maintaining a more uniform tempe...
- Patent number 9,027,573
- Issue date May 12, 2015
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus
- Patent number 8,882,961
- Issue date Nov 11, 2014
- Tokyo Electron Limited
- Hironobu Hyakutake
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,778,092
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,685,169
- Issue date Apr 1, 2014
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, computer pro...
- Patent number 8,577,502
- Issue date Nov 5, 2013
- Tokyo Electron Limited
- Hiroshi Tanaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cleaning method and apparatus
- Patent number 6,293,288
- Issue date Sep 25, 2001
- Tokyo Electron Limited
- Naoki Shindo
- B08 - CLEANING
Information Patent Grant
Cleaning method
- Patent number 6,203,627
- Issue date Mar 20, 2001
- Tokyo Electron Limited
- Naoki Shindo
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240035168
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220108898
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Wet Chemical Etching in Semiconductor Processing
- Publication number 20210384049
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Derek William Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210335621
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200251343
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20200152489
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20190371595
- Publication date Dec 5, 2019
- TOKYO ELECTRON LIMITED
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190172734
- Publication date Jun 6, 2019
- TOKYO ELECTRON LIMITED
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20180158701
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170037499
- Publication date Feb 9, 2017
- TOKYO ELECTRON LIMITED
- Hironobu Hyakutake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170025268
- Publication date Jan 26, 2017
- TOKYO ELECTRON LIMITED
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140283887
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20110290279
- Publication date Dec 1, 2011
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20110259521
- Publication date Oct 27, 2011
- Tokyo Electron Limited
- Hironobu Hyakutake
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20110220153
- Publication date Sep 15, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20110126860
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, RECYCLING METHOD OF FILTRATION MATERIA...
- Publication number 20100223805
- Publication date Sep 9, 2010
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus, liquid processing method, computer pro...
- Publication number 20080097647
- Publication date Apr 24, 2008
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning method and apparatus
- Publication number 20010009156
- Publication date Jul 26, 2001
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS

Hironobu Hyakutake

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing meihod

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Substrate liquid processing apparatus and substrate liquid processi...

Liquid processing apparatus, liquid processing method, and storage...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate processing apparatus for maintaining a more uniform tempe...

Substrate treatment apparatus

Substrate processing apparatus, substrate processing method and sto...

Substrate processing apparatus, substrate processing method and sto...

Liquid processing apparatus, liquid processing method, computer pro...

Cleaning method and apparatus

Cleaning method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

System and Method for Wet Chemical Etching in Semiconductor Processing

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING DEVICE, RECYCLING METHOD OF FILTRATION MATERIA...

Liquid processing apparatus, liquid processing method, computer pro...

Cleaning method and apparatus