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Hironori Ikezawa
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Saitama-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Projection optical system, exposure system, and exposure method
Patent number
7,978,310
Issue date
Jul 12, 2011
Nikon Corporation
Hironori Ikezawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system, exposure system, and exposure method
Patent number
7,710,653
Issue date
May 4, 2010
Nikon Corporation
Hironori Ikezawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system and method for photolithography and expos...
Patent number
7,701,640
Issue date
Apr 20, 2010
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system and method for photolithography and expos...
Patent number
7,688,517
Issue date
Mar 30, 2010
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system, exposure system, and exposure method
Patent number
7,688,422
Issue date
Mar 30, 2010
Nikon Corporation
Hironori Ikezawa
G02 - OPTICS
Information
Patent Grant
Projection optical system and method for photolithography and expos...
Patent number
7,619,827
Issue date
Nov 17, 2009
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system and method for photolithography and expos...
Patent number
7,609,455
Issue date
Oct 27, 2009
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system and method for photolithography and expos...
Patent number
7,580,197
Issue date
Aug 25, 2009
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Immersion objective optical system, exposure apparatus, device fabr...
Patent number
7,557,997
Issue date
Jul 7, 2009
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system and method for photolithography and expos...
Patent number
7,551,362
Issue date
Jun 23, 2009
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
7,471,374
Issue date
Dec 30, 2008
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system and method for photolithography and expos...
Patent number
7,362,508
Issue date
Apr 22, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Production method of projection optical system
Patent number
6,788,389
Issue date
Sep 7, 2004
Nikon Corporation
Youhei Fujishima
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
PROJECTION OPTICAL ASSEMBLY, PROJECTION OPTICAL ASSEMBLY ADJUSTMENT...
Publication number
20130278910
Publication date
Oct 24, 2013
Hironori Ikezawa
G02 - OPTICS
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD
Publication number
20100159401
Publication date
Jun 24, 2010
Nikon Corporation
Hironori Ikezawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection optical system and method for photolithography and expos...
Publication number
20080094696
Publication date
Apr 24, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Immersion objective optical system, exposure apparatus, device fabr...
Publication number
20080080067
Publication date
Apr 3, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Projection optical system and method for photolithography and expos...
Publication number
20080068576
Publication date
Mar 20, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Projection optical system and method for photolithography and expos...
Publication number
20080068573
Publication date
Mar 20, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Projection optical system and method for photolithography and expos...
Publication number
20080068724
Publication date
Mar 20, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Projection optical system and method for photolithography and expos...
Publication number
20080049336
Publication date
Feb 28, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Projection optical system and method for photolithography and expos...
Publication number
20080049306
Publication date
Feb 28, 2008
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Projection Optical System, Exposure System, And Exposure Method
Publication number
20070285633
Publication date
Dec 13, 2007
Nikon Corporation
Hironori Ikezawa
G02 - OPTICS
Information
Patent Application
Projection optical system, exposure system, and exposure method
Publication number
20070188879
Publication date
Aug 16, 2007
Nikon Corporation
Hironori Ikezawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection optical system, exposure apparatus, and exposure method
Publication number
20060087633
Publication date
Apr 27, 2006
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection optical system and method for photolithography and expos...
Publication number
20050248856
Publication date
Nov 10, 2005
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Production method of projection optical system
Publication number
20030053036
Publication date
Mar 20, 2003
Nikon Corporation
Youhei Fujishima
C30 - CRYSTAL GROWTH