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Hiroshi Akiyama
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Kudamatsu-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Pressure control device for low pressure processing chamber
Patent number
7,680,563
Issue date
Mar 16, 2010
Hitachi High-Technologies Corporation
Naoyuki Kofuji
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20110120649
Publication date
May 26, 2011
Kouhei Satou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20100167426
Publication date
Jul 1, 2010
Naoyuki Kofuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20090152241
Publication date
Jun 18, 2009
Go Miya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pressure Control Device for Low Pressure Processing Chamber
Publication number
20080183340
Publication date
Jul 31, 2008
Naoyuki KOFUJI
G05 - CONTROLLING REGULATING
Information
Patent Application
Control Method for plasma etching apparatus
Publication number
20080154422
Publication date
Jun 26, 2008
Naoyuki Kofuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20080110400
Publication date
May 15, 2008
Kouhei Satou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20080110569
Publication date
May 15, 2008
Go Miya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20080078505
Publication date
Apr 3, 2008
Naoyuki Kofuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma etching apparatus and plasma etching method
Publication number
20070209759
Publication date
Sep 13, 2007
Go Miya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for plasma etching
Publication number
20070199657
Publication date
Aug 30, 2007
Naoyuki Kofuji
H01 - BASIC ELECTRIC ELEMENTS