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Hiroshi Kawamoto
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Saitama, JP
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last 30 patents
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Patent Grant
Apparatus detecting an IC defect by comparing electron emissions fr...
Patent number
5,821,761
Issue date
Oct 13, 1998
Advantest Corporation
Soichi Shida
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting an IC defect using charged parti...
Patent number
5,757,198
Issue date
May 26, 1998
Advantest Corporation
Soichi Shida
G01 - MEASURING TESTING
Information
Patent Grant
IC fault analysis system having charged particle beam tester
Patent number
5,640,098
Issue date
Jun 17, 1997
Advantest Corporation
Hironobu Niijima
G01 - MEASURING TESTING
Information
Patent Grant
Method for detecting an IC defect using charged particle beam
Patent number
5,592,100
Issue date
Jan 7, 1997
Advantest Corporation
Soichi Shida
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for detecting an IC defect using a charged par...
Patent number
5,521,517
Issue date
May 28, 1996
Advantest Corporation
Soichi Shida
G01 - MEASURING TESTING