Hiroshi Makihira

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for picking up 2D image of an object to be sensed
- Patent number 7,221,486
- Issue date May 22, 2007
- Hitachi, Ltd.
- Hiroshi Makihira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and apparatus therefor
- Patent number 6,674,890
- Issue date Jan 6, 2004
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for picking up 2D image of an object to be sensed
- Patent number 6,507,417
- Issue date Jan 14, 2003
- Hitachi, Ltd.
- Hiroshi Makihira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern checking method and checking apparatus
- Patent number 6,317,512
- Issue date Nov 13, 2001
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and apparatus therefor
- Patent number 6,169,282
- Issue date Jan 2, 2001
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern checking method and checking apparatus
- Patent number 5,649,022
- Issue date Jul 15, 1997
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for pattern detection
- Patent number 5,430,548
- Issue date Jul 4, 1995
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting patterns
- Patent number 5,153,444
- Issue date Oct 6, 1992
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of and apparatus for checking geometry of multi-layer patter...
- Patent number 4,791,586
- Issue date Dec 13, 1988
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic focusing method and apparatus utilizing contrasts of proj...
- Patent number 4,725,722
- Issue date Feb 16, 1988
- Hitachi, Ltd.
- Shunji Maeda
- G02 - OPTICS
Information Patent Grant
Method of detecting pattern defect and its apparatus
- Patent number 4,614,430
- Issue date Sep 30, 1986
- Hitachi Ltd.
- Yasuhiko Hara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for detecting edge of fine pattern on specimen
- Patent number 4,556,797
- Issue date Dec 3, 1985
- Hitachi, Ltd.
- Asahiro Kuni
- G01 - MEASURING TESTING
Information Patent Grant
Shape detecting apparatus
- Patent number 4,472,056
- Issue date Sep 18, 1984
- Hitachi, Ltd.
- Yasuo Nakagawa
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for appearance inspection
- Patent number 4,410,278
- Issue date Oct 18, 1983
- Hitachi, Ltd.
- Hiroshi Makihira
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection system
- Patent number 4,403,294
- Issue date Sep 6, 1983
- Hitachi, Ltd.
- Toshimitsu Hamada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Shape testing apparatus
- Patent number 4,343,553
- Issue date Aug 10, 1982
- Hitachi, Ltd.
- Yasuo Nakagawa
- G01 - MEASURING TESTING
Information Patent Grant
Cylindrical body appearance inspection apparatus
- Patent number 4,226,539
- Issue date Oct 7, 1980
- Hitachi, Ltd.
- Yasuo Nakagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for detecting positions of chips on a semicond...
- Patent number 4,213,117
- Issue date Jul 15, 1980
- Hitachi, Ltd.
- Yukio Kembo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for picking up 2D image of an object to be sensed
- Publication number 20030030853
- Publication date Feb 13, 2003
- Hiroshi Makihira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect inspection method and apparatus therefor
- Publication number 20020031248
- Publication date Mar 14, 2002
- Shunji Maed
- G01 - MEASURING TESTING

Hiroshi Makihira

Person

Patents Grantslast 30 patents

Method and apparatus for picking up 2D image of an object to be sensed

Defect inspection method and apparatus therefor

Method and apparatus for picking up 2D image of an object to be sensed

Pattern checking method and checking apparatus

Defect inspection method and apparatus therefor

Pattern checking method and checking apparatus

Method and apparatus for pattern detection

Method and apparatus for detecting patterns

Method of and apparatus for checking geometry of multi-layer patter...

Automatic focusing method and apparatus utilizing contrasts of proj...

Method of detecting pattern defect and its apparatus

Method and apparatus for detecting edge of fine pattern on specimen

Shape detecting apparatus

Method and apparatus for appearance inspection

Surface defect inspection system

Shape testing apparatus

Cylindrical body appearance inspection apparatus

Method and apparatus for detecting positions of chips on a semicond...

Patents Applicationslast 30 patents

Method and apparatus for picking up 2D image of an object to be sensed

Defect inspection method and apparatus therefor