Number | Date | Country | Kind |
---|---|---|---|
52-141643 | Nov 1977 | JPX | |
53-38135 | Apr 1978 | JPX | |
53-42115 | Apr 1978 | JPX | |
53-43226 | Apr 1978 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3575588 | Hermann | Apr 1971 | |
3693154 | Kubo et al. | Sep 1972 | |
3796497 | Mathisen et al. | Mar 1974 | |
3898617 | Kashioka et al. | Aug 1975 | |
3955072 | Johannsmeier et al. | May 1976 | |
4091394 | Kashioka et al. | May 1978 | |
4115762 | Akiyama et al. | Sep 1978 |
Entry |
---|
Bojman, "Electro-optical Alignment of Substrates", IBM Tech. Disclosure Bulletin, vol. 13, No. 9, Feb., 1971, pp. 2687-2688. |
Davis et al., "Automatic Registration in an Electron-beam Lithographic System", Solid State Technology, Aug., 1978, pp. 61-67. |