Hiroshi Morita

Person

Itami, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for cleaning a substrate with metastable helium
- Patent number 5,318,654
- Issue date Jun 7, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Maruyama
- B08 - CLEANING
Information Patent Grant
Method of treating semiconductor substrate surface and method of ma...
- Patent number 5,306,671
- Issue date Apr 26, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method with enhanced anisotropic property and appara...
- Patent number 5,223,085
- Issue date Jun 29, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Kawai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning a surface
- Patent number 5,147,465
- Issue date Sep 15, 1992
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Maruyama
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus including an electromagnet with a bird...
- Patent number 5,038,013
- Issue date Aug 6, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Moriaki Akazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for manufacturing stacked semiconductor devices
- Patent number 4,987,092
- Issue date Jan 22, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Kiyoteru Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer treating apparatus utilizing a plasma
- Patent number 4,877,509
- Issue date Oct 31, 1989
- Mitsubishi Denki Kabushiki Kaisha
- Toshiaki Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiroshi Morita

Person

Patents Grantslast 30 patents

Apparatus for cleaning a substrate with metastable helium

Method of treating semiconductor substrate surface and method of ma...

Plasma etching method with enhanced anisotropic property and appara...

Method of cleaning a surface

Plasma processing apparatus including an electromagnet with a bird...

Process for manufacturing stacked semiconductor devices

Semiconductor wafer treating apparatus utilizing a plasma