Number | Date | Country | Kind |
---|---|---|---|
1-321471 | Dec 1989 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3673071 | Pritchard et al. | Jun 1972 | |
3983264 | Schroen et al. | Sep 1976 | |
4244799 | Fraser et al. | Jan 1981 | |
4711698 | Douglas | Dec 1987 | |
4795717 | Okamura | Jan 1989 | |
4831963 | Saito et al. | May 1989 | |
4863561 | Freeman et al. | Sep 1989 | |
5002632 | Loewenstein et al. | Mar 1991 |
Entry |
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Ikawa et al, "Si Surface Treatment Using Deep UV Irradiation", 1985 Dry Process Symposium, NEC Corporation, pp. 25-29. |
Irino et al, "The Removal Method of Carbon Contamination By R.I.E.", Applied Physics Society, 1987, p. 562. |