Hiroshi Shinriki

Person

Tama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming metal film by ALD using beta-diketone metal complex
- Patent number 8,133,555
- Issue date Mar 13, 2012
- ASM Japan K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic composition controlled ruthenium alloy film formed by plasma...
- Patent number 8,084,104
- Issue date Dec 27, 2011
- ASM Japan K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium alloy film for copper interconnects
- Patent number 7,799,674
- Issue date Sep 21, 2010
- ASM Japan K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metal wiring structure
- Patent number 7,785,658
- Issue date Aug 31, 2010
- ASM Japan K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming Ta-Ru liner layer for Cu wiring
- Patent number 7,655,564
- Issue date Feb 2, 2010
- ASM Japan, K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium thin film-formed structure
- Patent number 7,435,484
- Issue date Oct 14, 2008
- ASM Japan K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for forming thin film using upstream and downs...
- Patent number 7,408,225
- Issue date Aug 5, 2008
- ASM Japan K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film deposition apparatus
- Patent number 7,273,526
- Issue date Sep 25, 2007
- ASM Japan K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing semiconductor devices
- Patent number 5,336,638
- Issue date Aug 9, 1994
- Hitachi, Ltd.
- Masayuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 5,292,673
- Issue date Mar 8, 1994
- Hitachi, Ltd.
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for producing a semiconductor device
- Patent number 5,079,191
- Issue date Jan 7, 1992
- Hitachi, Ltd.
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor capacitor device with dual dielectric
- Patent number 4,937,650
- Issue date Jun 26, 1990
- Hitachi, Ltd.
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 4,891,684
- Issue date Jan 2, 1990
- Hitachi, Ltd.
- Yasushiro Nishioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device
- Patent number 4,809,052
- Issue date Feb 28, 1989
- Hitachi, Ltd.
- Yasushiro Nishioka
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING METAL FILM BY ALD USING BETA-DIKETONE METAL COMPLEX
- Publication number 20100092696
- Publication date Apr 15, 2010
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC COMPOSITION CONTROLLED RUTHENIUM ALLOY FILM FORMED BY PLASMA...
- Publication number 20100055433
- Publication date Mar 4, 2010
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RUTHENIUM ALLOY FILM FOR COPPER INTERCONNECTS
- Publication number 20090209101
- Publication date Aug 20, 2009
- ASM JAPAN K.K.
- Hiroshi SHINRIKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING Ta-Ru LINER LAYER FOR Cu WIRING
- Publication number 20090155997
- Publication date Jun 18, 2009
- ASM JAPAN K.K.
- Hiroshi SHINRIKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING RUTHENIUM COMPLEX FILM USING Beta-DIKETONE-COORD...
- Publication number 20090087339
- Publication date Apr 2, 2009
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING RUTHENIUM FILM FOR METAL WIRING STRUCTURE
- Publication number 20080318417
- Publication date Dec 25, 2008
- ASM JAPAN K.K.
- Hiroshi SHINRIKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING RU FILM AND METAL WIRING STRUCTURE
- Publication number 20080124484
- Publication date May 29, 2008
- ASM JAPAN K.K.
- Hiroshi SHINRIKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING RUTHENIUM FILM FOR METAL WIRING STRUCTURE
- Publication number 20080054472
- Publication date Mar 6, 2008
- ASM JAPAN K.K.
- Hiroshi SHINRIKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMATION BY ATOMIC LAYER GROWTH AND CHEMICAL VAPOR DEPOS...
- Publication number 20070264427
- Publication date Nov 15, 2007
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for foming metal wiring structure
- Publication number 20070082130
- Publication date Apr 12, 2007
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming metal wiring structure
- Publication number 20070082132
- Publication date Apr 12, 2007
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thin-film deposition apparatus
- Publication number 20050229848
- Publication date Oct 20, 2005
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for forming thin film using upstream and downs...
- Publication number 20050208217
- Publication date Sep 22, 2005
- ASM JAPAN K.K.
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming thin film and appatus for forming thin film
- Publication number 20030170388
- Publication date Sep 11, 2003
- Hiroshi Shinriki
- C30 - CRYSTAL GROWTH

Hiroshi Shinriki

Person

Patents Grantslast 30 patents

Method for forming metal film by ALD using beta-diketone metal complex

Atomic composition controlled ruthenium alloy film formed by plasma...

Ruthenium alloy film for copper interconnects

Method for forming metal wiring structure

Method for forming Ta-Ru liner layer for Cu wiring

Ruthenium thin film-formed structure

Apparatus and method for forming thin film using upstream and downs...

Thin-film deposition apparatus

Process for manufacturing semiconductor devices

Method of manufacturing a semiconductor device

Process for producing a semiconductor device

Semiconductor capacitor device with dual dielectric

Semiconductor device

Semiconductor memory device

Patents Applicationslast 30 patents

METHOD FOR FORMING METAL FILM BY ALD USING BETA-DIKETONE METAL COMPLEX

ATOMIC COMPOSITION CONTROLLED RUTHENIUM ALLOY FILM FORMED BY PLASMA...

RUTHENIUM ALLOY FILM FOR COPPER INTERCONNECTS

METHOD FOR FORMING Ta-Ru LINER LAYER FOR Cu WIRING

METHOD FOR FORMING RUTHENIUM COMPLEX FILM USING Beta-DIKETONE-COORD...

METHOD OF FORMING RUTHENIUM FILM FOR METAL WIRING STRUCTURE

METHOD OF FORMING RU FILM AND METAL WIRING STRUCTURE

METHOD OF FORMING RUTHENIUM FILM FOR METAL WIRING STRUCTURE

THIN FILM FORMATION BY ATOMIC LAYER GROWTH AND CHEMICAL VAPOR DEPOS...

Method for foming metal wiring structure

Method for forming metal wiring structure

Thin-film deposition apparatus

Apparatus and method for forming thin film using upstream and downs...

Method for forming thin film and appatus for forming thin film