Hiroshi Sotozaki

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for polishing, processing system, and method of polishing
- Patent number 12,179,312
- Issue date Dec 31, 2024
- Ebara Corporation
- Takuya Moriura
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing and method for polishing
- Patent number 11,642,755
- Issue date May 9, 2023
- Ebara Corporation
- Pohan Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,612,983
- Issue date Mar 28, 2023
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing and method for polishing
- Patent number 11,465,256
- Issue date Oct 11, 2022
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 11,426,834
- Issue date Aug 30, 2022
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing and method for polishing
- Patent number 11,413,723
- Issue date Aug 16, 2022
- Ebara Corporation
- Pohan Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,007,621
- Issue date May 18, 2021
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Calibration method and non-transitory computer-readable storage med...
- Patent number 10,987,776
- Issue date Apr 27, 2021
- Ebara Corporation
- Pohan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Turntable cloth peeling jig
- Patent number 10,730,162
- Issue date Aug 4, 2020
- Ebara Corporation
- Hiroshi Sotozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning a polishing surface, polishing apparatus, an...
- Patent number 10,661,411
- Issue date May 26, 2020
- Ebara Corporation
- Ryuichi Kosuge
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 10,486,285
- Issue date Nov 26, 2019
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 9,687,957
- Issue date Jun 27, 2017
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate transfer method and subst...
- Patent number 9,530,676
- Issue date Dec 27, 2016
- Ebara Corporation
- Toshio Yokoyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Polishing apparatus
- Patent number 9,434,044
- Issue date Sep 6, 2016
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 9,358,662
- Issue date Jun 7, 2016
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 8,795,032
- Issue date Aug 5, 2014
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device and substrate processing device
- Patent number 7,850,817
- Issue date Dec 14, 2010
- Ebara Corporation
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning apparatus
- Patent number 6,851,152
- Issue date Feb 8, 2005
- Ebara Corporation
- Hiroshi Sotozaki
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus
- Patent number 6,643,882
- Issue date Nov 11, 2003
- Ebara Corporation
- Hiroshi Sotozaki
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate polishing apparatus with...
- Patent number 6,616,512
- Issue date Sep 9, 2003
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 6,494,985
- Issue date Dec 17, 2002
- Ebara Corporation
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
- Publication number 20250058431
- Publication date Feb 20, 2025
- EBARA CORPORATION
- Takuya MORIURA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240363372
- Publication date Oct 31, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20240227115
- Publication date Jul 11, 2024
- EBARA CORPORATION
- Tetsuya TERADA
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
- Publication number 20210283746
- Publication date Sep 16, 2021
- EBARA CORPORATION
- Takuya MORIURA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20210229240
- Publication date Jul 29, 2021
- EBARA CORPORATION
- Hiroshi SOTOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20200047309
- Publication date Feb 13, 2020
- Mitsuru MIYAZAKI
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING AND METHOD FOR POLISHING
- Publication number 20200039029
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING AND METHOD FOR POLISHING
- Publication number 20200039031
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Pohan Chen
- B24 - GRINDING POLISHING
Information Patent Application
CALIBRATION METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MED...
- Publication number 20180345454
- Publication date Dec 6, 2018
- EBARA CORPORATION
- Pohan CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20180290263
- Publication date Oct 11, 2018
- EBARA CORPORATION
- Hiroshi SOTOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
TURNTABLE CLOTH PEELING JIG
- Publication number 20180009081
- Publication date Jan 11, 2018
- EBARA CORPORATION
- Hiroshi Sotozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20170252894
- Publication date Sep 7, 2017
- EBARA CORPORATION
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLEANING A POLISHING SURFACE, POLISHING APPARATUS, AN...
- Publication number 20160144478
- Publication date May 26, 2016
- EBARA CORPORATION
- Ryuichi Kosuge
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
POLISHING APPARATUS
- Publication number 20150273649
- Publication date Oct 1, 2015
- EBARA CORPORATION
- Ryuichi KOSUGE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...
- Publication number 20150221536
- Publication date Aug 6, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20150050863
- Publication date Feb 19, 2015
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20140302676
- Publication date Oct 9, 2014
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...
- Publication number 20120308356
- Publication date Dec 6, 2012
- Toshio YOKOYAMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...
- Publication number 20120193506
- Publication date Aug 2, 2012
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus, substrate processing method, substr...
- Publication number 20090305612
- Publication date Dec 10, 2009
- EBARA CORPORATION
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus, substrate transfer apparatus, subst...
- Publication number 20090067959
- Publication date Mar 12, 2009
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
Polishing device and substrate processing device
- Publication number 20040261944
- Publication date Dec 30, 2004
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing a substrate
- Publication number 20040155013
- Publication date Aug 12, 2004
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing a substrate
- Publication number 20030051812
- Publication date Mar 20, 2003
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Application
Substrate cleaning apparatus and substrate polishing apparatus with...
- Publication number 20020045413
- Publication date Apr 18, 2002
- Hiroshi Sotozaki
- B24 - GRINDING POLISHING
Information Patent Application
Substrate cleaning apparatus
- Publication number 20020022445
- Publication date Feb 21, 2002
- Hiroshi Sotozaki
- H01 - BASIC ELECTRIC ELEMENTS

Hiroshi Sotozaki

Person

Patents Grantslast 30 patents

Apparatus for polishing, processing system, and method of polishing

Apparatus for polishing and method for polishing

Polishing apparatus and polishing method

Apparatus for polishing and method for polishing

Substrate processing apparatus, substrate processing method, substr...

Apparatus for polishing and method for polishing

Polishing apparatus and polishing method

Calibration method and non-transitory computer-readable storage med...

Turntable cloth peeling jig

Apparatus for cleaning a polishing surface, polishing apparatus, an...

Substrate processing apparatus, substrate processing method, substr...

Substrate processing apparatus, substrate processing method, substr...

Substrate processing apparatus, substrate transfer method and subst...

Polishing apparatus

Substrate processing apparatus, substrate processing method, substr...

Substrate processing apparatus, substrate processing method, substr...

Polishing device and substrate processing device

Substrate cleaning apparatus

Substrate cleaning apparatus

Substrate cleaning apparatus and substrate polishing apparatus with...

Method and apparatus for polishing a substrate

Patents Applicationslast 30 patents

APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING

SUBSTRATE PROCESSING APPARATUS

POLISHING APPARATUS

APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

APPARATUS FOR POLISHING AND METHOD FOR POLISHING

APPARATUS FOR POLISHING AND METHOD FOR POLISHING

CALIBRATION METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MED...

POLISHING APPARATUS AND POLISHING METHOD

TURNTABLE CLOTH PEELING JIG

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

APPARATUS FOR CLEANING A POLISHING SURFACE, POLISHING APPARATUS, AN...

POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...

Substrate processing apparatus, substrate processing method, substr...

Substrate processing apparatus, substrate transfer apparatus, subst...

Polishing device and substrate processing device

Method and apparatus for polishing a substrate

Method and apparatus for polishing a substrate

Substrate cleaning apparatus and substrate polishing apparatus with...

Substrate cleaning apparatus