TREA

Hiroshi Takebayashi

Follow

Person

  • Nagoya-Shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer placement table
    • Patent number 12,191,123
    • Issue date Jan 7, 2025
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic heater
    • Patent number 12,120,783
    • Issue date Oct 15, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Ceramic heater with shaft
    • Patent number 12,108,499
    • Issue date Oct 1, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer placement table and method of manufacturing the same
    • Patent number 12,087,613
    • Issue date Sep 10, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,040,165
    • Issue date Jul 16, 2024
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Ceramic heater
    • Patent number 12,027,385
    • Issue date Jul 2, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck with high insulation performance and electrosta...
    • Patent number 11,951,583
    • Issue date Apr 9, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer placement table
    • Patent number 11,948,825
    • Issue date Apr 2, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck heater
    • Patent number 11,837,490
    • Issue date Dec 5, 2023
    • NGL INSULATORS, LTD.
    • Kenichiro Aikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement device
    • Patent number 11,810,767
    • Issue date Nov 7, 2023
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic heater
    • Patent number 11,798,792
    • Issue date Oct 24, 2023
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus and method for man...
    • Patent number 11,784,068
    • Issue date Oct 10, 2023
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer-heating device
    • Patent number 11,515,180
    • Issue date Nov 29, 2022
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus
    • Patent number 11,469,118
    • Issue date Oct 11, 2022
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus and method for pro...
    • Patent number 11,205,584
    • Issue date Dec 21, 2021
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck heater
    • Patent number 10,930,539
    • Issue date Feb 23, 2021
    • NGK Insulators, Ltd.
    • Rishun Kin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Metal wiring bonding structure and production method therefor
    • Patent number 10,668,558
    • Issue date Jun 2, 2020
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Integrated wiring board assembly
    • Patent number 10,609,818
    • Issue date Mar 31, 2020
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic heater
    • Patent number 10,566,218
    • Issue date Feb 18, 2020
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck heater
    • Patent number 10,483,146
    • Issue date Nov 19, 2019
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Shaft-end mounting structure
    • Patent number 10,388,560
    • Issue date Aug 20, 2019
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer support structure
    • Patent number 10,332,774
    • Issue date Jun 25, 2019
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck heater
    • Patent number 10,292,209
    • Issue date May 14, 2019
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Sheet heater for electrostatic chuck
    • Patent number D846513
    • Issue date Apr 23, 2019
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Disc-shaped heater and heater-cooling-plate assembly
    • Patent number 10,256,105
    • Issue date Apr 9, 2019
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Flexible printed circuits
    • Patent number D843334
    • Issue date Mar 19, 2019
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Metal wiring bonding structure and production method therefor
    • Patent number 10,029,328
    • Issue date Jul 24, 2018
    • NGK Insulators, Ltd.
    • Rishun Kin
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Flexible printed circuits
    • Patent number D821987
    • Issue date Jul 3, 2018
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Bonding structure and semiconductor device manufacturing apparatus
    • Patent number 8,480,806
    • Issue date Jul 9, 2013
    • NGK Insulators, Ltd.
    • Taichi Nakamura
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Bonding structure and semiconductor device manufacturing apparatus
    • Patent number 8,414,704
    • Issue date Apr 9, 2013
    • NGK Insulators, Ltd.
    • Tomoyuki Fujii
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK ASSEMBLY
    • Publication number 20240105488
    • Publication date Mar 28, 2024
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20240055240
    • Publication date Feb 15, 2024
    • NGK Insulators, Ltd.
    • Mitsuru KOJIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20240006226
    • Publication date Jan 4, 2024
    • NGK Insulators, Ltd.
    • Mitsuru KOJIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20240006194
    • Publication date Jan 4, 2024
    • NGK Insulators, Ltd.
    • Mitsuru KOJIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230317430
    • Publication date Oct 5, 2023
    • NGK Insulators, Ltd.
    • Ikuhisa MORIOKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20230290622
    • Publication date Sep 14, 2023
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEEDER MEMBER AND WAFER PLACEMENT TABLE
    • Publication number 20230282497
    • Publication date Sep 7, 2023
    • NGK Insulators, Ltd.
    • Mitsuru KOJIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230223245
    • Publication date Jul 13, 2023
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230197500
    • Publication date Jun 22, 2023
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MAN...
    • Publication number 20230125679
    • Publication date Apr 27, 2023
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230123870
    • Publication date Apr 20, 2023
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230111137
    • Publication date Apr 13, 2023
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230116574
    • Publication date Apr 13, 2023
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230057107
    • Publication date Feb 23, 2023
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230055928
    • Publication date Feb 23, 2023
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MAN...
    • Publication number 20220246451
    • Publication date Aug 4, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR-MANUFACTURING APPARATUS MEMBER AND METHOD OF MANUFACT...
    • Publication number 20220189812
    • Publication date Jun 16, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20220110190
    • Publication date Apr 7, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    WAFER PLACEMENT TABLE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20220102186
    • Publication date Mar 31, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220053611
    • Publication date Feb 17, 2022
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220046762
    • Publication date Feb 10, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK HEATER
    • Publication number 20220037188
    • Publication date Feb 3, 2022
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220030668
    • Publication date Jan 27, 2022
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220030669
    • Publication date Jan 27, 2022
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20210398840
    • Publication date Dec 23, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20210394320
    • Publication date Dec 23, 2021
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20210320025
    • Publication date Oct 14, 2021
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20210287885
    • Publication date Sep 16, 2021
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20210225669
    • Publication date Jul 22, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK HEATER
    • Publication number 20210225683
    • Publication date Jul 22, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS