Hiroyuki IKUTA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning method and plasma treatment device
- Patent number 12,129,544
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yoshiyuki Kondo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 12,112,921
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Hiroyuki Ikuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,077,865
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Hideki Yuasa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,060,641
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming boron-based film, formation apparatus
- Patent number 11,615,957
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD AND PLASMA TREATMENT DEVICE
- Publication number 20230220545
- Publication date Jul 13, 2023
- TOKYO ELECTRON LIMITED
- Yoshiyuki KONDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230061151
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Hideki YUASA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230062105
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Makoto WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20220235462
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20220223378
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki IKUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220037124
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Satoshi ITOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS
- Publication number 20210090888
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Member for Plasma Processing Apparatus and Plasma Processing Apparatus
- Publication number 20170133204
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Kazuki MOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS, DEPOSITION METHOD, AND STORAGE MEDIUM HAVING...
- Publication number 20110183069
- Publication date Jul 28, 2011
- TOKYO ELECTRON LIMITED
- Hiroyuki Ikuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE OF EVAPORATING APPARATUS AND CONTROL METHOD OF EVAPO...
- Publication number 20100086681
- Publication date Apr 8, 2010
- TOKYO ELECTRON LIMITED
- Hiroyuki Ikuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION UNIT, EVAPORATION METHOD, CONTROLLER FOR EVAPORATION UN...
- Publication number 20100028534
- Publication date Feb 4, 2010
- TOKYO ELECTRON LIMITED
- Yuji ONO
- C30 - CRYSTAL GROWTH
Information Patent Application
EVAPORATING APPARATUS, APPARATUS FOR CONTROLLING EVAPORATING APPARA...
- Publication number 20090304906
- Publication date Dec 10, 2009
- TOKYO ELECTRON LIMITED
- Kenji Suduo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiroyuki IKUTA

Person

Patents Grantslast 30 patents

Cleaning method and plasma treatment device

Plasma processing method and plasma processing apparatus

Film forming method and film forming apparatus

Film forming method and film forming apparatus

Method for forming boron-based film, formation apparatus

Patents Applicationslast 30 patents

CLEANING METHOD AND PLASMA TREATMENT DEVICE

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS

Member for Plasma Processing Apparatus and Plasma Processing Apparatus

DEPOSITION APPARATUS, DEPOSITION METHOD, AND STORAGE MEDIUM HAVING...

CONTROL DEVICE OF EVAPORATING APPARATUS AND CONTROL METHOD OF EVAPO...

EVAPORATION UNIT, EVAPORATION METHOD, CONTROLLER FOR EVAPORATION UN...

EVAPORATING APPARATUS, APPARATUS FOR CONTROLLING EVAPORATING APPARA...