TREA

Hiroyuki Iwai

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  • Sagamihara, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate transferring apparatus
    • Patent number 6,132,160
    • Issue date Oct 17, 2000
    • Tokyo Electron Limited
    • Hiroyuki Iwai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Treatment apparatus
    • Patent number 5,829,939
    • Issue date Nov 3, 1998
    • Tokyo Electron Kabushiki Kaisha
    • Hiroyuki Iwai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing apparatus
    • Patent number 5,788,448
    • Issue date Aug 4, 1998
    • Tokyo Electron Limited
    • Tsutomu Wakamori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heat treatment method and device
    • Patent number 5,645,419
    • Issue date Jul 8, 1997
    • Tokyo Electron Kabushiki Kaisha
    • Tetsu Ohsawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Treatment apparatus
    • Patent number 5,562,383
    • Issue date Oct 8, 1996
    • Tokyo Electron Kabushiki Kaisha
    • Hiroyuki Iwai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vertical type heat treatment system
    • Patent number 5,447,294
    • Issue date Sep 5, 1995
    • Tokyo Electron Limited
    • Kazunari Sakata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate transferring apparatus
    • Patent number 5,445,486
    • Issue date Aug 29, 1995
    • Tokyo Electron Sagami Limited
    • Hirofumi Kitayama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vertical heat-treatment apparatus having a wafer transfer mechanism
    • Patent number 5,110,248
    • Issue date May 5, 1992
    • Tokyo Electron Sagami Limited
    • Takanobu Asano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of loading and unloading wafer boat
    • Patent number 5,055,036
    • Issue date Oct 8, 1991
    • Tokyo Electron Sagami Limited
    • Takanobu Asano
    • C30 - CRYSTAL GROWTH