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Hiroyuki Kawasaki

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Patents Grantslast 30 patents

  • Information Patent Grant

    Pump apparatus
    • Patent number 11,835,047
    • Issue date Dec 5, 2023
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Double-suction centrifugal pump
    • Patent number 11,441,576
    • Issue date Sep 13, 2022
    • Ebara Corporation
    • Soichiro Ogawa
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Substrate processing apparatus and substrate processing method
    • Patent number 11,192,147
    • Issue date Dec 7, 2021
    • Ebara Corporation
    • Yu Ishii
    • B08 - CLEANING
  • Information Patent Grant

    Liquid ring vacuum pump
    • Patent number 11,143,186
    • Issue date Oct 12, 2021
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Substrate processing apparatus and substrate processing method
    • Patent number 10,799,917
    • Issue date Oct 13, 2020
    • Ebara Corporation
    • Yu Ishii
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus and substrate processing method
    • Patent number 10,328,465
    • Issue date Jun 25, 2019
    • Ebara Corporation
    • Yu Ishii
    • B08 - CLEANING
  • Information Patent Grant

    Abrasive film fabrication method and abrasive film
    • Patent number 10,016,875
    • Issue date Jul 10, 2018
    • Ebara Corporation
    • Yu Ishii
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing method
    • Patent number 9,492,910
    • Issue date Nov 15, 2016
    • Ebara Corporation
    • Yu Ishii
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Abrasive film fabrication method and abrasive film
    • Patent number 9,393,595
    • Issue date Jul 19, 2016
    • Ebara Corporation
    • Yu Ishii
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Turbo vacuum pump
    • Patent number 8,109,744
    • Issue date Feb 7, 2012
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo vacuum pump
    • Patent number 8,087,907
    • Issue date Jan 3, 2012
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Turbo vacuum pump
    • Patent number 7,938,619
    • Issue date May 10, 2011
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo vacuum pump
    • Patent number 7,645,116
    • Issue date Jan 12, 2010
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,953,317
    • Issue date Oct 11, 2005
    • Ebara Corporation
    • Tetsuma Ikegami
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,926,493
    • Issue date Aug 9, 2005
    • Ebara Corporation
    • Matsutaro Miyamoto
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Gas recirculation flow control method and apparatus for use in vacu...
    • Patent number 6,782,907
    • Issue date Aug 31, 2004
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,589,009
    • Issue date Jul 8, 2003
    • Ebara Corporation
    • Atsushi Shiokawa
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,585,480
    • Issue date Jul 1, 2003
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,468,030
    • Issue date Oct 22, 2002
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,409,468
    • Issue date Jun 25, 2002
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Vacuum exhaust system
    • Patent number 6,382,249
    • Issue date May 7, 2002
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,343,910
    • Issue date Feb 5, 2002
    • Ebera Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo-molecular pump
    • Patent number 6,332,752
    • Issue date Dec 25, 2001
    • Ebara Corporation
    • Tetsuma Ikegami
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

  • Information Patent Application

    VERTICAL MULTI-STAGE PUMP
    • Publication number 20220333615
    • Publication date Oct 20, 2022
    • EBARA CORPORATION
    • Masaki WATANABE
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    PUMP APPARATUS
    • Publication number 20220290675
    • Publication date Sep 15, 2022
    • EBARA CORPORATION
    • Hiroyuki KAWASAKI
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    DOUBLE-SUCTION CENTRIFUGAL PUMP
    • Publication number 20210115940
    • Publication date Apr 22, 2021
    • EBARA CORPORATION
    • Soichiro OGAWA
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    LIQUID RING VACUUM PUMP
    • Publication number 20200141410
    • Publication date May 7, 2020
    • EBARA CORPORATION
    • Hiroyuki KAWASAKI
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20190262870
    • Publication date Aug 29, 2019
    • EBARA CORPORATION
    • Yu Ishii
    • B08 - CLEANING
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20190262869
    • Publication date Aug 29, 2019
    • EBARA CORPORATION
    • Yu Ishii
    • B08 - CLEANING
  • Information Patent Application

    ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM
    • Publication number 20160318155
    • Publication date Nov 3, 2016
    • EBARA CORPORATION
    • Yu ISHII
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    POLISHING METHOD
    • Publication number 20160052107
    • Publication date Feb 25, 2016
    • EBARA CORPORATION
    • Yu ISHII
    • B24 - GRINDING POLISHING
  • Information Patent Application

    ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM
    • Publication number 20140030962
    • Publication date Jan 30, 2014
    • EBARA CORPORATION
    • Yu ISHII
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    VACUUM EVACUATION APPARATUS
    • Publication number 20130259712
    • Publication date Oct 3, 2013
    • EBARA CORPORATION
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20130213437
    • Publication date Aug 22, 2013
    • Kabushiki Kaisha Toshiba
    • Yu Ishii
    • B08 - CLEANING
  • Information Patent Application

    TURBO VACUUM PUMP
    • Publication number 20090246048
    • Publication date Oct 1, 2009
    • EBARA CORPORATION
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    TURBO VACUUM PUMP
    • Publication number 20090246038
    • Publication date Oct 1, 2009
    • EBARA CORPORATION
    • Hiroyuki KAWASAKI
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo vacuum pump
    • Publication number 20090142183
    • Publication date Jun 4, 2009
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    ROTARY APPARATUS
    • Publication number 20090108703
    • Publication date Apr 30, 2009
    • EBARA CORPORATION
    • Hiroyuki KAWASAKI
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo vacuum pump
    • Publication number 20060263205
    • Publication date Nov 23, 2006
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo-molecular pump
    • Publication number 20030017047
    • Publication date Jan 23, 2003
    • EBARA CORPORATION
    • Atsushi Shiokawa
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Gas recirculation flow control method and apparatus for use in vacu...
    • Publication number 20020134439
    • Publication date Sep 26, 2002
    • Hiroyuki Kawasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Turbo-molecular pump
    • Publication number 20020054815
    • Publication date May 9, 2002
    • EBARA CORPORATION
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo-molecular pump
    • Publication number 20020028132
    • Publication date Mar 7, 2002
    • EBARA CORPORATION
    • TETSUMA IKEGAMI
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo-molecular pump
    • Publication number 20010055526
    • Publication date Dec 27, 2001
    • EBARA CORPORATION
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    TURBO-MOLECULAR PUMP
    • Publication number 20010016160
    • Publication date Aug 23, 2001
    • EBARA CORPORATION
    • TETSUMA IKEGAMI
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...