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Hiroyuki Miyashita
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Tokyo, JP
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last 30 patents
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Patent Grant
Halftone phase shift photomask, halftone phase shift photomask blan...
Patent number
5,916,712
Issue date
Jun 29, 1999
Dai Nippon Printing Co., Ltd.
Hiroyuki Miyashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift photomask, halftone phase shift photomask blan...
Patent number
5,738,959
Issue date
Apr 14, 1998
Dai Nippon Printing Co., Ltd.
Hiroyuki Miyashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift photomask and phase shift photomask dry etching method
Patent number
5,723,234
Issue date
Mar 3, 1998
Dai Nippon Printing Co., Ltd.
Toshifumi Yokoyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blanks for halftone phase shift photomasks, halftone phase shift ph...
Patent number
5,721,075
Issue date
Feb 24, 1998
Dai Nippon Printing Co., Ltd.
Keiji Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift photomask, phase shift photomask blank, and process for...
Patent number
5,702,847
Issue date
Dec 30, 1997
Dai Nippon Printing Co., Ltd.
Norihiro Tarumoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift layer-containing photomask, and its production and corr...
Patent number
5,688,617
Issue date
Nov 18, 1997
Dai Nippon Printing Co., Ltd.
Koichi Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blanks for halftone phase shift photomasks, halftone phase shift ph...
Patent number
5,614,335
Issue date
Mar 25, 1997
Dai Nippon Printing Co., Ltd.
Keiji Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift layer-containing photomask, and its production and corr...
Patent number
5,614,336
Issue date
Mar 25, 1997
Dai Nippon Printing Co., Ltd.
Koichi Mikami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift photomask comprising a single layer of halfton...
Patent number
5,604,060
Issue date
Feb 18, 1997
Dai Nippon Printing Co., Ltd.
Hiroyuki Miyashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlying shifter type phase shift photomask blank, overlying shift...
Patent number
5,576,123
Issue date
Nov 19, 1996
Dai Nippon Printing Co., Ltd.
Hiroshi Mohri
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blanks for phase shift photomasks, and phase shift photomasks
Patent number
5,561,009
Issue date
Oct 1, 1996
Dai Nippon Printing Co., Ltd.
Hiroshi Mohri
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift photomask, halftone phase shift photomask blan...
Patent number
5,538,816
Issue date
Jul 23, 1996
Dai Nippon Printing Co., Ltd.
Keiji Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift photomask comprising a layer of aluminum oxide with mag...
Patent number
5,380,608
Issue date
Jan 10, 1995
Dai Nippon Printing Co., Ltd.
Hiroyuki Miyashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY