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Hisashi Abe

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  • Atsugi-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of manufacturing a semiconductor device
    • Patent number 8,304,350
    • Issue date Nov 6, 2012
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma CVD apparatus
    • Patent number 8,278,195
    • Issue date Oct 2, 2012
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma CVD apparatus
    • Patent number 8,053,338
    • Issue date Nov 8, 2011
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma CVD apparatus
    • Patent number 7,723,218
    • Issue date May 25, 2010
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and a manufacturing method of a thin...
    • Patent number 7,691,692
    • Issue date Apr 6, 2010
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Manufacturing method of a thin film semiconductor device
    • Patent number 7,452,794
    • Issue date Nov 18, 2008
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of manufacturing a semiconductor device
    • Patent number 7,271,082
    • Issue date Sep 18, 2007
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma CVD apparatus
    • Patent number 6,499,427
    • Issue date Dec 31, 2002
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and method and a manufacturing metho...
    • Patent number 6,482,752
    • Issue date Nov 19, 2002
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma CVD apparatus
    • Patent number 6,283,060
    • Issue date Sep 4, 2001
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treatment apparatus
    • Patent number 5,330,578
    • Issue date Jul 19, 1994
    • Semiconductor Energy Laboratory Co., Ltd.
    • Mitsunori Sakama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA CVD APPARATUS
    • Publication number 20120045593
    • Publication date Feb 23, 2012
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei YAMAZAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD AND A MANUFACTURING METHO...
    • Publication number 20100144077
    • Publication date Jun 10, 2010
    • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA CVD APPARATUS
    • Publication number 20090197012
    • Publication date Aug 6, 2009
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei YAMAZAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus and method and a manufacturing metho...
    • Publication number 20090029509
    • Publication date Jan 29, 2009
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus and method and a manufacturing metho...
    • Publication number 20070173046
    • Publication date Jul 26, 2007
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma CVD apparatus
    • Publication number 20050176221
    • Publication date Aug 11, 2005
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma CVD apparatus
    • Publication number 20030066485
    • Publication date Apr 10, 2003
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus and method and a manufacturing metho...
    • Publication number 20020197760
    • Publication date Dec 26, 2002
    • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...