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Hitoshi Habuka
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Maebashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Silicon epitaxial wafer and production method therefor
Patent number
6,569,239
Issue date
May 27, 2003
Shin-Etsu Handotai Co., Ltd.
Takeshi Arai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for fabricating silicon thin film
Patent number
6,309,458
Issue date
Oct 30, 2001
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of chemical vapor deposition
Patent number
6,254,933
Issue date
Jul 3, 2001
Shin-Etsu Handotai, Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for fabrication of thin film
Patent number
6,245,647
Issue date
Jun 12, 2001
Shin-Etsu Handotai Co., Ltd.
Shoji Akiyama
C30 - CRYSTAL GROWTH
Information
Patent Grant
Silicon single crystal and process for producing single-crystal sil...
Patent number
6,238,478
Issue date
May 29, 2001
Shin-Etsu Handotai, Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Process for cleaning silicon semiconductor substrates
Patent number
6,235,645
Issue date
May 22, 2001
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating furnace and manufacturing method therefor
Patent number
6,194,691
Issue date
Feb 27, 2001
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for treating a surface of a silicon single crystal and a met...
Patent number
6,124,209
Issue date
Sep 26, 2000
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat-treating method and radiant heating device
Patent number
6,072,164
Issue date
Jun 6, 2000
Shin-Estu Handotai Co., Ltd.
Naoto Tate
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method and apparatus for thin film growth
Patent number
6,048,793
Issue date
Apr 11, 2000
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for smoothing surface of silicon single crystal substrate
Patent number
6,008,128
Issue date
Dec 28, 1999
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for growing single-crystalline semiconductor film
Patent number
5,993,557
Issue date
Nov 30, 1999
Shin-Etsu Handotai Co., Ltd.
Munenori Tomita
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for vapor phase growth
Patent number
5,938,840
Issue date
Aug 17, 1999
Shin-Etsu Handotai, Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treating method of a semiconductor single crystal substrate
Patent number
5,913,974
Issue date
Jun 22, 1999
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon semiconductor crystal and a method for manufacturing it
Patent number
5,885,346
Issue date
Mar 23, 1999
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing silicon single crystal thin film
Patent number
5,868,833
Issue date
Feb 9, 1999
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of producing thin film
Patent number
5,858,881
Issue date
Jan 12, 1999
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for growing single-crystalline semiconductor film and appara...
Patent number
5,849,078
Issue date
Dec 15, 1998
Shin-Etsu Handotai Co., Ltd.
Munenori Tomita
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of producing single crystal thin film
Patent number
5,846,321
Issue date
Dec 8, 1998
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for vapor phase growth
Patent number
5,755,878
Issue date
May 26, 1998
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of chemical vapor deposition and reactor therefor
Patent number
5,749,974
Issue date
May 12, 1998
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of producing single crystal thin film
Patent number
5,743,956
Issue date
Apr 28, 1998
Shin-Etsu Handotai, Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for vapor-phase growth
Patent number
5,718,762
Issue date
Feb 17, 1998
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of manufacturing a single crystal thin film
Patent number
5,685,905
Issue date
Nov 11, 1997
Shin-Etsu Handotai, Co., Ltd.
Takatoshi Nagoya
C30 - CRYSTAL GROWTH
Information
Patent Grant
Apparatus for vapor-phase epitaxial growth
Patent number
5,672,204
Issue date
Sep 30, 1997
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Process for preparing light-emitting diodes using a maximum layer t...
Patent number
5,057,442
Issue date
Oct 15, 1991
Shin-Etsu Handotai Co., Ltd.
Hitoshi Habuka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Silicon epitaxial wafer and production method therefor
Publication number
20010039917
Publication date
Nov 15, 2001
Shin-Etsu Handotai, Co., Ltd.
Takeshi Arai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILICON EPITAXIAL WAFER AND PRODUCTION METHOD THEREFOR
Publication number
20010001384
Publication date
May 24, 2001
TAKESHI ARAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...