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Hitoshi Komuro
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Hitachinaka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for measuring sample and measurement device
Patent number
8,581,187
Issue date
Nov 12, 2013
Hitachi High-Technologies Corporation
Mihoko Kijima
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Pattern measuring method and pattern measuring device
Patent number
8,507,856
Issue date
Aug 13, 2013
Hitachi High-Technologies Corporation
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern matching method and computer program for executing pattern...
Patent number
8,244,042
Issue date
Aug 14, 2012
Hitachi High-Technologies Corporation
Akiyuki Sugiyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Recipe generation system and method
Patent number
8,189,040
Issue date
May 29, 2012
Hitachi High-Technologies Corporation
Hiromi Fujita
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method, device and computer program of length measurement
Patent number
8,019,161
Issue date
Sep 13, 2011
Hitachi High-Technologies Corporation
Hidetoshi Morokuma
G01 - MEASURING TESTING
Information
Patent Grant
Pattern matching method and computer program for executing pattern...
Patent number
7,925,095
Issue date
Apr 12, 2011
Hitachi High-Technologies Corporation
Akiyuki Sugiyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern matching method and pattern matching program
Patent number
7,889,909
Issue date
Feb 15, 2011
Hitachi High-Technologies Corporation
Hiroyuki Shindo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern measuring method and pattern measuring device
Patent number
7,518,110
Issue date
Apr 14, 2009
Hitachi High-Technologies Corporation
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Review work supporting system
Patent number
6,978,041
Issue date
Dec 20, 2005
Hitachi, Ltd.
Seiji Isogai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Investigation device and investigation method
Patent number
6,968,079
Issue date
Nov 22, 2005
Hitachi, Ltd.
Akira Yoshikawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect inspection method and apparatus for silicon wafer
Patent number
6,683,683
Issue date
Jan 27, 2004
Hitachi, Ltd.
Koji Tomita
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection method and apparatus for silicon wafer
Patent number
6,384,909
Issue date
May 7, 2002
Hitachi, Ltd.
Koji Tomita
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus for silicon wafer
Patent number
6,256,092
Issue date
Jul 3, 2001
Hitachi, Ltd.
Koji Tomita
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus for silicon wafer
Patent number
6,157,444
Issue date
Dec 5, 2000
Hitachi, Ltd.
Koji Tomita
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE
Publication number
20120211653
Publication date
Aug 23, 2012
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN MATCHING METHOD AND COMPUTER PROGRAM FOR EXECUTING PATTERN...
Publication number
20110150345
Publication date
Jun 23, 2011
Hitachi High-Technologies Corporation
Akiyuki SUGIYAMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MEASURING SAMPLE AND MEASUREMENT DEVICE
Publication number
20110139982
Publication date
Jun 16, 2011
Hitachi High-Technologies Corporation
Mihoko Kijima
G01 - MEASURING TESTING
Information
Patent Application
PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE
Publication number
20090200465
Publication date
Aug 13, 2009
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Recipe Generation System and Method
Publication number
20090062934
Publication date
Mar 5, 2009
Hitachi High-Technologies Corporation
Hiromi FUJITA
G05 - CONTROLLING REGULATING
Information
Patent Application
Pattern matching method and computer program for executing pattern...
Publication number
20080037830
Publication date
Feb 14, 2008
Akiyuki Sugiyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Workpiece size measurement method and apparatus
Publication number
20070221842
Publication date
Sep 27, 2007
Hidetoshi Morokuma
G01 - MEASURING TESTING
Information
Patent Application
Pattern matching method and pattern matching program
Publication number
20070223803
Publication date
Sep 27, 2007
Hitachi High-Technologies Corporation
Hiroyuki Shindo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern measuring method and pattern measuring device
Publication number
20060193508
Publication date
Aug 31, 2006
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Review work supporting system
Publication number
20020196968
Publication date
Dec 26, 2002
Seiji Isogai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Defect inspection method and apparatus for silicon wafer
Publication number
20020080344
Publication date
Jun 27, 2002
Koji Tomita
G01 - MEASURING TESTING
Information
Patent Application
Investigation device and investigation method
Publication number
20020001404
Publication date
Jan 3, 2002
Akira Yoshikawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Defect inspection method and apparatus for silicon wafer
Publication number
20010015802
Publication date
Aug 23, 2001
Koji Tomita
G01 - MEASURING TESTING