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Sputtering apparatus and sputtering method
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Patent number 8,016,982
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Issue date Sep 13, 2011
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Panasonic Corporation
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Masahiro Yamamoto
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus and method
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Patent number 5,626,727
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Issue date May 6, 1997
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Matsushita Electric Industrial Co., Ltd.
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Hitoshi Yamanishi
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H01 - BASIC ELECTRIC ELEMENTS
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Sputtering apparatus
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Patent number 5,609,739
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Issue date Mar 11, 1997
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Matsushita Electric Industrial Co., Ltd.
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Isamu Aokura
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H01 - BASIC ELECTRIC ELEMENTS
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Laminated magnetic head core
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Patent number 5,600,520
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Issue date Feb 4, 1997
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Matsushita Electric Industrial Co., Ltd.
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Isamu Aokura
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G11 - INFORMATION STORAGE
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Sputtering electrode
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Patent number 5,512,156
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Issue date Apr 30, 1996
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Matsushita Electric Industrial Co., Ltd.
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Hitoshi Yamanishi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Reactive sputtering apparatus
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Patent number 5,322,605
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Issue date Jun 21, 1994
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Matsushita Electric Industrial Co., Ltd.
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Hitoshi Yamanishi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...