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Holger Juergensen
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Aachen, DE
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last 30 patents
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Patent Grant
Loading and unloading apparatus for a coating device
Patent number
7,762,208
Issue date
Jul 27, 2010
Aixtron AG
Holger Juergensen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device and method for depositing one or more layers on a substrate
Patent number
6,849,241
Issue date
Feb 1, 2005
Aixtron AG
Martin Dauelsberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Process for Depositing Thin Layers on a Substrate in a Process Cham...
Publication number
20090178620
Publication date
Jul 16, 2009
Holger Juergensen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Loading and Unloading Apparatus For A Coating Device
Publication number
20080014057
Publication date
Jan 17, 2008
Aixtron AG
Holger Juergensen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Loading and unloading apparatus for a coating device
Publication number
20050214102
Publication date
Sep 29, 2005
Holger Juergensen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Device and method for depositing one or more layers on a substrate
Publication number
20030056720
Publication date
Mar 27, 2003
Martin Dauelsberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and device for depositing at least one precursor, which is i...
Publication number
20030056728
Publication date
Mar 27, 2003
Johannes Lindner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...