Membership
Tour
Register
Log in
Holger Weigand
Follow
Person
Oberkochen, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Particle-optical component and system comprising a particle-optical...
Patent number
6,642,525
Issue date
Nov 4, 2003
Carl Zeiss SMT AG
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Particle-optical component and system comprising a particle-optical...
Publication number
20020084422
Publication date
Jul 4, 2002
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS