Number | Date | Country | Kind |
---|---|---|---|
100 44 199 | Sep 2000 | DE |
Number | Name | Date | Kind |
---|---|---|---|
3984687 | Loffler et al. | Oct 1976 | A |
4376249 | Pfeiffer et al. | Mar 1983 | A |
4525629 | Morita et al. | Jun 1985 | A |
4544846 | Langner et al. | Oct 1985 | A |
4882486 | Kruit | Nov 1989 | A |
4929838 | Yasuda et al. | May 1990 | A |
4945246 | Davis et al. | Jul 1990 | A |
4977324 | Kruit et al. | Dec 1990 | A |
5258246 | Berger et al. | Nov 1993 | A |
5264706 | Oae et al. | Nov 1993 | A |
5285074 | Haire et al. | Feb 1994 | A |
5382498 | Berger | Jan 1995 | A |
5389858 | Langner et al. | Feb 1995 | A |
5466904 | Pfeiffer et al. | Nov 1995 | A |
5481164 | Langner et al. | Jan 1996 | A |
5523580 | Davis | Jun 1996 | A |
5530252 | Petric | Jun 1996 | A |
5545902 | Pfeiffer et al. | Aug 1996 | A |
5633507 | Pfeiffer et al. | May 1997 | A |
5635719 | Petric | Jun 1997 | A |
5674413 | Pfeiffer et al. | Oct 1997 | A |
5708274 | Langner et al. | Jan 1998 | A |
5747814 | Gordon et al. | May 1998 | A |
5747819 | Nakasuji et al. | May 1998 | A |
5757010 | Langner | May 1998 | A |
5770863 | Nakasuji | Jun 1998 | A |
5793048 | Petric et al. | Aug 1998 | A |
5825043 | Suwa | Oct 1998 | A |
5850083 | Koikari et al. | Dec 1998 | A |
5952667 | Shimizu | Sep 1999 | A |
5977550 | Nakasuji | Nov 1999 | A |
5994708 | Nakasuji | Nov 1999 | A |
6005250 | Stickel et al. | Dec 1999 | A |
6023067 | Stickel et al. | Feb 2000 | A |
6060711 | Shimizu | May 2000 | A |
6064071 | Nakasuji | May 2000 | A |
6066853 | Nakasuji | May 2000 | A |
6066855 | Simizu | May 2000 | A |
6069684 | Golladay et al. | May 2000 | A |
6078054 | Nakasuji | Jun 2000 | A |
6078382 | Nakasuji | Jun 2000 | A |
6420713 | Stickel et al. | Jul 2002 | B1 |
Number | Date | Country |
---|---|---|
100 44 199 | Jun 2002 | DE |
0 969 326 | Jan 2000 | EP |
Entry |
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Xieqing Zhu et al., “Analysis of Off-Axis Shaped Beam Systems for High Throughput Electron Beam Lithography”, SPIE vol. 3155, pp. 47-60 (1997). |