Hong SHIH

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for conditioning semiconductor processing chamber components
- Patent number 12,129,569
- Issue date Oct 29, 2024
- Lam Research Corporation
- Lin Xu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Conditioning chamber component
- Patent number 12,064,795
- Issue date Aug 20, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Method for conditioning a ceramic coating
- Patent number 11,384,430
- Issue date Jul 12, 2022
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to selectively pattern a surface for plasma resistant coat a...
- Patent number 11,124,659
- Issue date Sep 21, 2021
- Lam Research Corporation
- Amir A. Yasseri
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Conditioning chamber component
- Patent number 10,967,407
- Issue date Apr 6, 2021
- Lam Research Corporation
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface coating treatment
- Patent number 10,422,028
- Issue date Sep 24, 2019
- Lam Research Corporation
- Lihua Li Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck cleaning fixture
- Patent number 10,391,526
- Issue date Aug 27, 2019
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Method for conditioning silicon part
- Patent number 9,947,558
- Issue date Apr 17, 2018
- Lam Research Corporation
- Lin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating system and method for coating interior fluid wetted surface...
- Patent number 9,873,940
- Issue date Jan 23, 2018
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual phase cleaning chambers and assemblies comprising the same
- Patent number 9,748,078
- Issue date Aug 29, 2017
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Dielectric window cleaning apparatuses
- Patent number 9,623,449
- Issue date Apr 18, 2017
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
- Patent number 9,546,432
- Issue date Jan 17, 2017
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Portable sonic particle removal tool with a chemically controlled w...
- Patent number 9,505,036
- Issue date Nov 29, 2016
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Methods for mixed acid cleaning of showerhead electrodes
- Patent number 9,396,912
- Issue date Jul 19, 2016
- Lam Research Corporation
- Armen Avoyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adapter plate for polishing and cleaning electrodes
- Patent number 9,393,666
- Issue date Jul 19, 2016
- Lam Research Corporation
- Catherine Zhou
- B24 - GRINDING POLISHING
Information Patent Grant
Method of wet cleaning aluminum chamber parts
- Patent number 9,387,521
- Issue date Jul 12, 2016
- Lam Research Corporation
- Hong Shih
- B24 - GRINDING POLISHING
Information Patent Grant
Corrosion resistant aluminum coating on plasma chamber components
- Patent number 9,337,002
- Issue date May 10, 2016
- Lam Research Corporation
- John Daugherty
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Mixed acid cleaning assemblies
- Patent number 9,293,305
- Issue date Mar 22, 2016
- Lam Research Corporation
- Armen Avoyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual phase cleaning chambers and assemblies comprising the same
- Patent number 9,245,719
- Issue date Jan 26, 2016
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Platen and adapter assemblies for facilitating silicon electrode po...
- Patent number 9,120,201
- Issue date Sep 1, 2015
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
- Patent number 9,123,651
- Issue date Sep 1, 2015
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removing damaged epoxy from electrostatic chuck
- Patent number 9,105,676
- Issue date Aug 11, 2015
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING
Information Patent Grant
System and method for testing an electrostatic chuck
- Patent number 9,082,805
- Issue date Jul 14, 2015
- Lam Research Corporation
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methodology for cleaning of surface metal contamination from an upp...
- Patent number 9,079,228
- Issue date Jul 14, 2015
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING
Information Patent Grant
Method for performing hot water seal on electrostatic chuck
- Patent number 9,054,148
- Issue date Jun 9, 2015
- Lam Research Corporation
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Process chamber component having yttrium—aluminum coating
- Patent number 9,012,030
- Issue date Apr 21, 2015
- Applied Materials, Inc.
- Nianci Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for cleaning gas injectors
- Patent number 8,945,317
- Issue date Feb 3, 2015
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Bare aluminum baffles for resist stripping chambers
- Patent number 8,859,432
- Issue date Oct 14, 2014
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automated bubble detection apparatus and method
- Patent number 8,854,451
- Issue date Oct 7, 2014
- Lam Research Corporation
- Josh Cormier
- G01 - MEASURING TESTING
Information Patent Grant
Actively heated aluminum baffle component having improved particle...
- Patent number 8,679,252
- Issue date Mar 25, 2014
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20240383017
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
TREATED CERAMIC CHAMBER PARTS
- Publication number 20240308926
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF CLEANING CHAMBER COMPONENTS WITH METAL ETCH RESIDUES
- Publication number 20240304428
- Publication date Sep 12, 2024
- LAM RESEARCH CORPORATION
- Wenbing YANG
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD FOR CONDITIONING SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
- Publication number 20230092570
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Lin XU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR CONDITIONING A CERAMIC COATING
- Publication number 20210280393
- Publication date Sep 9, 2021
- LAM RESEARCH CORPORATION
- Hong SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20210205858
- Publication date Jul 8, 2021
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO SELECTIVELY PATTERN A SURFACE FOR PLASMA RESISTANT COAT A...
- Publication number 20190233658
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20180318890
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING
- Publication number 20180144909
- Publication date May 24, 2018
- LAM RESEARCH CORPORATION
- Lihua Li HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...
- Publication number 20180127868
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Lin XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONDITIONING SILICON PART
- Publication number 20180047594
- Publication date Feb 15, 2018
- Lam Research Corporation
- Lin XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE COATING TREATMENT
- Publication number 20170159164
- Publication date Jun 8, 2017
- LAM RESEARCH CORPORATION
- Lihua Li HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING
- Publication number 20170040146
- Publication date Feb 9, 2017
- LAM RESEARCH CORPORATION
- Lihua Li HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems Comprising Silicon Coated Gas Supply Conduits and Methods f...
- Publication number 20170040147
- Publication date Feb 9, 2017
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
USE OF SINTERED NANOGRAINED YTTRIUM-BASED CERAMICS AS ETCH CHAMBER...
- Publication number 20170018408
- Publication date Jan 19, 2017
- LAM RESEARCH CORPORATION
- Lin XU
- B32 - LAYERED PRODUCTS
Information Patent Application
USE OF ATOMIC LAYER DEPOSITION COATINGS TO PROTECT BRAZING LINE AGA...
- Publication number 20160375515
- Publication date Dec 29, 2016
- LAM RESEARCH CORPORATION
- Lin XU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR COATING SURFACES
- Publication number 20160254125
- Publication date Sep 1, 2016
- LAM RESEARCH CORPORATION
- Lihua Li HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL PHASE CLEANING CHAMBERS AND ASSEMBLIES COMPRISING THE SAME
- Publication number 20160141153
- Publication date May 19, 2016
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
- Publication number 20150337450
- Publication date Nov 26, 2015
- LAM RESEARCH CORPORATION
- Hong SHIH
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20150235889
- Publication date Aug 20, 2015
- LAM RESEARCH CORPORATION
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALL...
- Publication number 20150187615
- Publication date Jul 2, 2015
- LAM RESEARCH CORPORATION
- John Daugherty
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...
- Publication number 20150184296
- Publication date Jul 2, 2015
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADAPTER PLATE FOR POLISHING AND CLEANING ELECTRODES
- Publication number 20150179416
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Catherine Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK CLEANING FIXTURE
- Publication number 20150165492
- Publication date Jun 18, 2015
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
COLD SPRAY BARRIER COATED COMPONENT OF A PLASMA PROCESSING CHAMBER...
- Publication number 20140315392
- Publication date Oct 23, 2014
- LAM RESEARCH CORPORATION
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
- Publication number 20140295670
- Publication date Oct 2, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS
- Publication number 20140272459
- Publication date Sep 18, 2014
- LAM RESEARCH CORPORATION
- John Daugherty
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
PORTABLE SONIC PARTICLE REMOVAL TOOL WITH A CHEMICALLY CONTROLLED W...
- Publication number 20140261575
- Publication date Sep 18, 2014
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS
- Publication number 20140150819
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
ACTIVELY HEATED ALUMINUM BAFFLE COMPONENT HAVING IMPROVED PARTICLE...
- Publication number 20140148013
- Publication date May 29, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Person

Patents Grantslast 30 patents

Method for conditioning semiconductor processing chamber components

Conditioning chamber component

Method for conditioning a ceramic coating

Method to selectively pattern a surface for plasma resistant coat a...

Conditioning chamber component

Surface coating treatment

Electrostatic chuck cleaning fixture

Method for conditioning silicon part

Coating system and method for coating interior fluid wetted surface...

Dual phase cleaning chambers and assemblies comprising the same

Dielectric window cleaning apparatuses

Dense oxide coated component of a plasma processing chamber and met...

Portable sonic particle removal tool with a chemically controlled w...

Methods for mixed acid cleaning of showerhead electrodes

Adapter plate for polishing and cleaning electrodes

Method of wet cleaning aluminum chamber parts

Corrosion resistant aluminum coating on plasma chamber components

Mixed acid cleaning assemblies

Dual phase cleaning chambers and assemblies comprising the same

Platen and adapter assemblies for facilitating silicon electrode po...

Dense oxide coated component of a plasma processing chamber and met...

Method of removing damaged epoxy from electrostatic chuck

System and method for testing an electrostatic chuck

Methodology for cleaning of surface metal contamination from an upp...

Method for performing hot water seal on electrostatic chuck

Process chamber component having yttrium—aluminum coating

System and method for cleaning gas injectors

Bare aluminum baffles for resist stripping chambers

Automated bubble detection apparatus and method

Actively heated aluminum baffle component having improved particle...

Patents Applicationslast 30 patents

CONDITIONING CHAMBER COMPONENT

TREATED CERAMIC CHAMBER PARTS

METHOD OF CLEANING CHAMBER COMPONENTS WITH METAL ETCH RESIDUES

METHOD FOR CONDITIONING SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

METHOD FOR CONDITIONING A CERAMIC COATING

CONDITIONING CHAMBER COMPONENT

METHOD TO SELECTIVELY PATTERN A SURFACE FOR PLASMA RESISTANT COAT A...

CONDITIONING CHAMBER COMPONENT

PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING

COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...

METHOD FOR CONDITIONING SILICON PART

SURFACE COATING TREATMENT

PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING

Systems Comprising Silicon Coated Gas Supply Conduits and Methods f...

USE OF SINTERED NANOGRAINED YTTRIUM-BASED CERAMICS AS ETCH CHAMBER...

USE OF ATOMIC LAYER DEPOSITION COATINGS TO PROTECT BRAZING LINE AGA...

METHOD FOR COATING SURFACES

DUAL PHASE CLEANING CHAMBERS AND ASSEMBLIES COMPRISING THE SAME

DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...

SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK

COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALL...

COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...

ADAPTER PLATE FOR POLISHING AND CLEANING ELECTRODES

ELECTROSTATIC CHUCK CLEANING FIXTURE

COLD SPRAY BARRIER COATED COMPONENT OF A PLASMA PROCESSING CHAMBER...

DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...

CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS

PORTABLE SONIC PARTICLE REMOVAL TOOL WITH A CHEMICALLY CONTROLLED W...

METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS

ACTIVELY HEATED ALUMINUM BAFFLE COMPONENT HAVING IMPROVED PARTICLE...