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Formation of composite tungsten films
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Patent number 7,605,083
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Issue date Oct 20, 2009
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Applied Materials, Inc.
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Ken K. Lai
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Formation of composite tungsten films
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Patent number 7,384,867
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Issue date Jun 10, 2008
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Applied Materials, Inc.
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Ken K. Lai
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Formation of composite tungsten films
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Patent number 6,939,804
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Issue date Sep 6, 2005
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Applied Materials, Inc.
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Ken K. Lai
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Deposition of tungsten films
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Patent number 6,827,978
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Issue date Dec 7, 2004
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Applied Materials, Inc.
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Hyungsuk A. Yoon
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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