Horng-Wen Chen

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Hsin Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
In-situ strip process for polysilicon etching in deep sub-micron te...
- Patent number RE40007
- Issue date Jan 22, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Horng-Wen Chen
- 134 - Cleaning and liquid contact with solids
Information Patent Grant
Method for monitoring contaminating particles in a chamber
- Patent number 6,660,528
- Issue date Dec 9, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd
- Horng-Wen Chen
- G01 - MEASURING TESTING
Information Patent Grant
In-situ strip process for polysilicon etching in deep sub-micron te...
- Patent number 6,283,131
- Issue date Sep 4, 2001
- Taiwan Semiconductor Manufacturing Company
- Horng-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for initiating a helium alarm particle detector in a dry etc...
- Patent number 6,254,398
- Issue date Jul 3, 2001
- Taiwan Semiconductor Manufacturing Company
- Horng-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to increase wafer utility by implementing deep trench in scr...
- Patent number 6,214,703
- Issue date Apr 10, 2001
- Taiwan Semiconductor Manufacturing Company
- Horng-Wen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to reduce contact resistance by means of in-situ ICP
- Patent number 5,962,345
- Issue date Oct 5, 1999
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Shuo Yen
- H01 - BASIC ELECTRIC ELEMENTS