Number | Name | Date | Kind |
---|---|---|---|
4341592 | Shortes et al. | Jul 1982 | |
4545851 | Takada | Oct 1985 | |
4581101 | Senoue et al. | Apr 1986 | |
4689112 | Bersin | Aug 1987 | |
4699689 | Bersin | Oct 1987 | |
4718976 | Fujimura | Jan 1988 | |
5272417 | Ohmi | Dec 1993 | |
5368710 | Chen et al. | Nov 1994 | |
5716534 | Tsuchiya et al. | Feb 1998 |
Entry |
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Chang et al, "ULSI Technology", McGraw Hill Companies, 1996, pp. 348-351. |
Elliott, "Integrated Circuit Fabrication Technology" McGraw Hill Book Company, 1982, pp. 305-307. |