Hsiao Chih Chang

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Yongkang City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Superimpose photomask and method of patterning
- Patent number 8,133,661
- Issue date Mar 13, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao Chih Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUPERIMPOSE PHOTOMASK AND METHOD OF PATTERNING
- Publication number 20110091797
- Publication date Apr 21, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao Chih Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
- Publication number 20070012335
- Publication date Jan 18, 2007
- Hsiao Chih Chang
- B08 - CLEANING