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Huan-Liang Tzeng

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  • Hsinchu, TW
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SYSTEMS AND METHODS FOR FIXED FOCUS RING PROCESSING
    • Publication number 20210202295
    • Publication date Jul 1, 2021
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Huan-Lisng TZENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEMS AND METHODS FOR FIXED FOCUS RING PROCESSING
    • Publication number 20190164804
    • Publication date May 30, 2019
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Huan-Lisng TZENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Center ball O-ring
    • Publication number 20050155709
    • Publication date Jul 21, 2005
    • Taiwan Semiconductor Manufacturing Co.
    • Huan-Liang Tzeng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Design for LPT arm cover
    • Publication number 20050095976
    • Publication date May 5, 2005
    • Taiwan Semiconductor Manufacturing Co.
    • Huan-Liang Tzeng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Insert liner for chamber entrance
    • Publication number 20050095187
    • Publication date May 5, 2005
    • Huan-Liang Tzeng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Gas distribution plate with anodized aluminum coating
    • Publication number 20040211674
    • Publication date Oct 28, 2004
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Huan-Liang Tzeng
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    Wall liner and slot liner for process chamber
    • Publication number 20040069223
    • Publication date Apr 15, 2004
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Huan-Liang Tzeng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dual-port end point window for plasma etcher
    • Publication number 20040069408
    • Publication date Apr 15, 2004
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Ping-Jen Cheng
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vibration-dampening base for ball-type lead screw of load port tran...
    • Publication number 20030234141
    • Publication date Dec 25, 2003
    • Taiwan Semiconductor Manufacturing, Co. Ltd.
    • Huan-Liang Tzeng
    • H01 - BASIC ELECTRIC ELEMENTS