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Lake Oswego, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
12,163,219
Issue date
Dec 10, 2024
Lam Research Corporation
Damodar Rajaram Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated showerhead with thermal control for delivering radical a...
Patent number
12,000,047
Issue date
Jun 4, 2024
Lam Research Corporation
Rachel E. Batzer
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
Patent number
11,920,239
Issue date
Mar 5, 2024
Lam Research Corporation
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer level uniformity control in remote plasma film deposition
Patent number
11,702,748
Issue date
Jul 18, 2023
Lam Research Corporation
Geoffrey Hohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated showerhead with thermal control for delivering radical a...
Patent number
11,608,559
Issue date
Mar 21, 2023
Lam Research Corporation
Rachel Batzer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radio frequency (RF) signal source supplying RF plasma generator an...
Patent number
11,557,460
Issue date
Jan 17, 2023
Lam Research Corporation
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
11,365,479
Issue date
Jun 21, 2022
Lam Research Corporation
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated showerhead with thermal control for delivering radical a...
Patent number
11,101,164
Issue date
Aug 24, 2021
Lam Research Corporation
Rachel Batzer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature controlled spacer for use in a substrate processing cha...
Patent number
11,004,662
Issue date
May 11, 2021
Lam Research Corporation
Taide Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
10,760,158
Issue date
Sep 1, 2020
Lam Research Corporation
Damodar Shanbhag
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated showerhead with thermal control for delivering radical a...
Patent number
10,604,841
Issue date
Mar 31, 2020
Lam Research Corporation
Rachel Batzer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
Patent number
9,828,672
Issue date
Nov 28, 2017
Lam Research Corporation
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
Publication number
20240318312
Publication date
Sep 26, 2024
LAM RESEARCH CORPORATION
Rachel E. BATZER
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
Publication number
20240218509
Publication date
Jul 4, 2024
LAM RESEARCH CORPORATION
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRECURSOR DISPENSING SYSTEMS WITH LINE CHARGE VOLUME CONTAINERS FOR...
Publication number
20240003008
Publication date
Jan 4, 2024
LAM RESEARCH CORPORATION
Saangrut SANGPLUG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING
Publication number
20230332291
Publication date
Oct 19, 2023
LAM RESEARCH CORPORATION
Bhadri VARADARAJAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
Publication number
20230304156
Publication date
Sep 28, 2023
LAM RESEARCH CORPORATION
Geoffrey HOHN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INCREASING PLASMA UNIFORMITY IN A RECEPTACLE
Publication number
20230223238
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Tongtong Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
Publication number
20230175134
Publication date
Jun 8, 2023
LAM RESEARCH CORPORATION
Rachel E. BATZER
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20230002891
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Damodar Rajaram SHANBHAG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PURGING SPINDLE ARMS TO PREVENT DEPOSITION AND WAFER SLIDING
Publication number
20230005776
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Prasanna KULKARNI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20220275504
Publication date
Sep 1, 2022
LAM RESEARCH CORPORATION
Damodar Rajaram SHANBHAG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
Publication number
20220145459
Publication date
May 12, 2022
LAM RESEARCH CORPORATION
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILMS
Publication number
20210384028
Publication date
Dec 9, 2021
LAM RESEARCH CORPORATION
James S. SIMS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
Publication number
20210371982
Publication date
Dec 2, 2021
LAM RESEARCH CORPORATION
Rachel BATZER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RADIO FREQUENCY (RF) SIGNAL SOURCE SUPPLYING RF PLASMA GENERATOR AN...
Publication number
20210257188
Publication date
Aug 19, 2021
LAM RESEARCH CORPORATION
Eller Y. JUCO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20200347497
Publication date
Nov 5, 2020
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20190185999
Publication date
Jun 20, 2019
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
Publication number
20180251893
Publication date
Sep 6, 2018
LAM RESEARCH CORPORATION
Geoffrey Hohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Temperature Controlled Spacer For Use In A Substrate Processing Cha...
Publication number
20180233326
Publication date
Aug 16, 2018
LAM RESEARCH CORPORATION
Taide Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
Publication number
20180163305
Publication date
Jun 14, 2018
LAM RESEARCH CORPORATION
Rachel Batzer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
Publication number
20180044791
Publication date
Feb 15, 2018
LAM RESEARCH CORPORATION
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
Publication number
20160281230
Publication date
Sep 29, 2016
LAM RESEARCH CORPORATION
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...