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Hubert Marie SEGERS
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's-Hertogenbosch, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus, method of transferring a substrate and devi...
Patent number
10,916,453
Issue date
Feb 9, 2021
ASML Netherlands B.V.
Aart Adrianus Van Beuzekom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus, method of transferring a substrate and devi...
Patent number
10,409,174
Issue date
Sep 10, 2019
ASML Netherlands B.V.
Aart Adrianus Van Beuzekom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated post-exposure bake track
Patent number
8,636,458
Issue date
Jan 28, 2014
ASML Netherlands B.V.
Suzan L. Auer-Jongepier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus, combination of lithographic apparatus and p...
Patent number
7,679,714
Issue date
Mar 16, 2010
ASML Netherlands B.V.
Johannes Onvlee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exchangeable object handling apparatus, lithographic apparatus incl...
Patent number
7,394,525
Issue date
Jul 1, 2008
ASML Netherlands B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,106,420
Issue date
Sep 12, 2006
ASML Netherlands B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus
Patent number
6,721,035
Issue date
Apr 13, 2004
ASML Netherlands B.V.
Hubert M. Segers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate handler for use in lithographic projection apparatus
Patent number
6,404,483
Issue date
Jun 11, 2002
ASML Netherlands B.V.
Hubert M. Segers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVI...
Publication number
20190391499
Publication date
Dec 26, 2019
ASML NETHERLANDS B.V.
Aart Adrianus VAN BEUZEKOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVI...
Publication number
20170108781
Publication date
Apr 20, 2017
ASML NETHERLANDS B.V.
Aart Adrianus VAN BEUZEKOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND SUBSTRATE HANDLING METHOD
Publication number
20130107241
Publication date
May 2, 2013
ASML NETHERLANDS B.V.
Raymond Wilhelmus Louis LAFARRE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Substrate Handling Method
Publication number
20130077078
Publication date
Mar 28, 2013
ASML NETHERLANDS B.V.
Raymond Wilhelmus Louis LAFARRE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Integrated post-exposure bake track
Publication number
20080304940
Publication date
Dec 11, 2008
Suzan L. Auer-Jongepier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithographic apparatus, combination of lithographic apparatus and p...
Publication number
20080145791
Publication date
Jun 19, 2008
ASML NETHERLANDS B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060087636
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060066833
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY