Hui-Shen Shih

Person

Changhua County, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Device and method of simultaneously removing flammable gases and ni...
- Patent number 11,633,695
- Issue date Apr 25, 2023
- Industrial Technology Research Institute
- Chuan-Lin Chang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Air purifier and air purifying method
- Patent number 11,364,319
- Issue date Jun 21, 2022
- Industrial Technology Research Institute
- I-Ling Nien
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Carbonized material, device for removing ozone, and method for remo...
- Patent number 10,695,715
- Issue date Jun 30, 2020
- Industrial Technology Research Institute
- Wen-An Xie
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Interlayer dielectric layer with two tensile dielectric layers
- Patent number 9,564,507
- Issue date Feb 7, 2017
- United Microelectronics Corp.
- Yu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating interlayer dielectric layer
- Patent number 9,281,238
- Issue date Mar 8, 2016
- United Microelectronics Corp.
- Yu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multifunction MEMS element and integrated method for making MOS and...
- Patent number 8,674,463
- Issue date Mar 18, 2014
- United Microelectronics Corp.
- Hui-Shen Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS diaphragm
- Patent number 8,492,857
- Issue date Jul 23, 2013
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 8,431,473
- Issue date Apr 30, 2013
- United Microelectronics Corp.
- Shu-Hui Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS diaphragm
- Patent number 8,390,085
- Issue date Mar 5, 2013
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of transferring a wafer
- Patent number 8,142,258
- Issue date Mar 27, 2012
- United Microelectronics Corp.
- Kuo-Wei Yang
- B24 - GRINDING POLISHING
Information Patent Grant
MEMS diaphragm
- Patent number 8,134,215
- Issue date Mar 13, 2012
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated structure of MEMS device and CMOS image sensor device
- Patent number 8,134,192
- Issue date Mar 13, 2012
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 8,101,987
- Issue date Jan 24, 2012
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system microphone structure
- Patent number 8,072,036
- Issue date Dec 6, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating micro-electromechanical system microphone str...
- Patent number 8,071,412
- Issue date Dec 6, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contact efuse structure
- Patent number 8,035,191
- Issue date Oct 11, 2011
- United Microelectronics Corp.
- Yung-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid-confining apparatus
- Patent number 7,967,960
- Issue date Jun 28, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method of controlling statuses of wafers
- Patent number 7,957,827
- Issue date Jun 7, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of transferring a wafer
- Patent number 7,909,677
- Issue date Mar 22, 2011
- United Microelectronics Corp.
- Kuo-Wei Yang
- B24 - GRINDING POLISHING
Information Patent Grant
Method of fabricating micro-electromechanical system microphone str...
- Patent number 7,851,247
- Issue date Dec 14, 2010
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated structure of MEMS device and CMOS image sensor device an...
- Patent number 7,833,818
- Issue date Nov 16, 2010
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of supplying polishing liquid
- Patent number 7,828,625
- Issue date Nov 9, 2010
- United Microelectronics Corp.
- Chi-Min Yu
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 7,795,056
- Issue date Sep 14, 2010
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chemical mechanical polishing method with inspection pre and post p...
- Patent number 7,732,332
- Issue date Jun 8, 2010
- United Microelectronics Corp.
- Hui-Shen Shih
- B24 - GRINDING POLISHING
Information Patent Grant
CMP head
- Patent number 7,731,572
- Issue date Jun 8, 2010
- United Microelectronics Corp.
- Chi-Min Yu
- B24 - GRINDING POLISHING
Information Patent Grant
Method of cleaning reaction chamber, method of forming protection f...
- Patent number 7,732,009
- Issue date Jun 8, 2010
- United Microelectronics Corp.
- Chih-Jen Mao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reworked integrated circuit device and reworking method thereof
- Patent number 7,662,645
- Issue date Feb 16, 2010
- United Microelectronics Corp.
- Hui-Shen Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching a dielectric layer to form a contact hole and a v...
- Patent number 7,557,025
- Issue date Jul 7, 2009
- United Microelectronics Corp.
- Hui-Shen Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device that includes baking...
- Patent number 7,510,964
- Issue date Mar 31, 2009
- United Microelectronics Corp.
- Chih-Jen Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of preventing a peeling issue of a high stressed thin film
- Patent number 7,482,244
- Issue date Jan 27, 2009
- United Microelectronics Corp.
- Chih-Jen Mao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STERILIZATION DEVICE WITH DOSE FUNCTION
- Publication number 20220023461
- Publication date Jan 27, 2022
- Industrial Technology Research Institute
- Meng-Hsuan LEE
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
AIR PURIFIER AND AIR PURIFYING METHOD
- Publication number 20200397940
- Publication date Dec 24, 2020
- Industrial Technology Research Institute
- I-Ling Nien
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
CARBONIZED MATERIAL, DEVICE FOR REMOVING OZONE, AND METHOD FOR REMO...
- Publication number 20180369751
- Publication date Dec 27, 2018
- Industrial Technology Research Institute
- Wen-An XIE
- C07 - ORGANIC CHEMISTRY
Information Patent Application
INTERLAYER DIELECTRIC LAYER WITH TWO TENSILE DIELECTRIC LAYERS
- Publication number 20160141383
- Publication date May 19, 2016
- UNITED MICROELECTRONICS CORP.
- Yu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING INTERLAYER DIELECTRIC LAYER
- Publication number 20160013098
- Publication date Jan 14, 2016
- UNITED MICROELECTRONICS CORP.
- Yu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRESS MEMORIZATION PROCESS AND SEMICONDUCTOR STRUCTURE INCLUDING C...
- Publication number 20150228788
- Publication date Aug 13, 2015
- UNITED MICROELECTRONICS CORP.
- Chun-Feng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR MATERIAL AND METHOD FOR FABRICATING THE SAME AND DETECTING M...
- Publication number 20130017611
- Publication date Jan 17, 2013
- Shou-Nan LI
- B82 - NANO-TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20130009288
- Publication date Jan 10, 2013
- Shu-Hui Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID-CONFINING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20120043199
- Publication date Feb 23, 2012
- Hui-Shen Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MEMS DIAPHRAGM
- Publication number 20110186945
- Publication date Aug 4, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIAPHRAGM
- Publication number 20110169110
- Publication date Jul 14, 2011
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of transferring a wafer
- Publication number 20110076129
- Publication date Mar 31, 2011
- Kuo-Wei Yang
- B24 - GRINDING POLISHING
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM MICROPHONE STRUCTURE
- Publication number 20110024851
- Publication date Feb 3, 2011
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM MICROPHONE STR...
- Publication number 20110027929
- Publication date Feb 3, 2011
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED STRUCTURE OF MEMS DEVICE AND CMOS IMAGE SENSOR DEVICE
- Publication number 20110006350
- Publication date Jan 13, 2011
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20100289066
- Publication date Nov 18, 2010
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIFUNCTION MENS ELEMENT AND INTEGRATED METHOD FOR MAKING MOS AND...
- Publication number 20100270628
- Publication date Oct 28, 2010
- Hui-Shen Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED STRUCTURE OF MEMS DEVICE AND CMOS IMAGE SENSOR DEVICE AN...
- Publication number 20100148283
- Publication date Jun 17, 2010
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO INTEGRATE MICRO ELECTRO MECHANICAL SYSTEM AND CMOS IMAGE...
- Publication number 20100144156
- Publication date Jun 10, 2010
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Contact efuse structure, method of making a contact efuse device co...
- Publication number 20100133649
- Publication date Jun 3, 2010
- Yung-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS DIAPHRAGM
- Publication number 20100090298
- Publication date Apr 15, 2010
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR THE PROTECTION OF INFORMATION IN MULTI-PROJECT WAFERS
- Publication number 20100068832
- Publication date Mar 18, 2010
- Hui-Shen Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM MICROPHONE STRUCTURE AND METHOD OF F...
- Publication number 20100065931
- Publication date Mar 18, 2010
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20090298216
- Publication date Dec 3, 2009
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM MICROPHONE
- Publication number 20090285419
- Publication date Nov 19, 2009
- United Microelectronics Corp.
- Hui-Shen Shih
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUID-CONFINING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20090200161
- Publication date Aug 13, 2009
- Hui-Shen Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF CONTROLLING STATUSES OF WAFERS
- Publication number 20090171495
- Publication date Jul 2, 2009
- United Microelectronics Corp.
- Hui-Shen Shih
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR FORMING AN OPENING OF NANO-METER SCALE
- Publication number 20090123877
- Publication date May 14, 2009
- Hui-Shen Shih
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR FORMING METAL FILM OR STACKED LAYER INCLUDING METAL FILM...
- Publication number 20090120785
- Publication date May 14, 2009
- United Microelectronics Corp.
- Hui-Shen Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Expandable polishing platen device
- Publication number 20090117835
- Publication date May 7, 2009
- Hui-Shen Shih
- B24 - GRINDING POLISHING

Hui-Shen Shih

Person

Patents Grantslast 30 patents

Device and method of simultaneously removing flammable gases and ni...

Air purifier and air purifying method

Carbonized material, device for removing ozone, and method for remo...

Interlayer dielectric layer with two tensile dielectric layers

Method for fabricating interlayer dielectric layer

Multifunction MEMS element and integrated method for making MOS and...

MEMS diaphragm

Method for fabricating semiconductor device

MEMS diaphragm

Method of transferring a wafer

MEMS diaphragm

Integrated structure of MEMS device and CMOS image sensor device

Semiconductor device and method of fabricating the same

Micro-electromechanical system microphone structure

Method of fabricating micro-electromechanical system microphone str...

Contact efuse structure

Fluid-confining apparatus

Method of controlling statuses of wafers

Method of transferring a wafer

Method of fabricating micro-electromechanical system microphone str...

Integrated structure of MEMS device and CMOS image sensor device an...

Method of supplying polishing liquid

Semiconductor device and method of fabricating the same

Chemical mechanical polishing method with inspection pre and post p...

CMP head

Method of cleaning reaction chamber, method of forming protection f...

Reworked integrated circuit device and reworking method thereof

Method of etching a dielectric layer to form a contact hole and a v...

Method for manufacturing semiconductor device that includes baking...

Method of preventing a peeling issue of a high stressed thin film

Patents Applicationslast 30 patents

STERILIZATION DEVICE WITH DOSE FUNCTION

AIR PURIFIER AND AIR PURIFYING METHOD

CARBONIZED MATERIAL, DEVICE FOR REMOVING OZONE, AND METHOD FOR REMO...

INTERLAYER DIELECTRIC LAYER WITH TWO TENSILE DIELECTRIC LAYERS

METHOD FOR FABRICATING INTERLAYER DIELECTRIC LAYER

STRESS MEMORIZATION PROCESS AND SEMICONDUCTOR STRUCTURE INCLUDING C...

SENSOR MATERIAL AND METHOD FOR FABRICATING THE SAME AND DETECTING M...

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

FLUID-CONFINING APPARATUS AND METHOD OF OPERATING THE SAME

MEMS DIAPHRAGM

MEMS DIAPHRAGM

Method of transferring a wafer

MICRO-ELECTROMECHANICAL SYSTEM MICROPHONE STRUCTURE

METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM MICROPHONE STR...

INTEGRATED STRUCTURE OF MEMS DEVICE AND CMOS IMAGE SENSOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

MULTIFUNCTION MENS ELEMENT AND INTEGRATED METHOD FOR MAKING MOS AND...

INTEGRATED STRUCTURE OF MEMS DEVICE AND CMOS IMAGE SENSOR DEVICE AN...

METHOD TO INTEGRATE MICRO ELECTRO MECHANICAL SYSTEM AND CMOS IMAGE...

Contact efuse structure, method of making a contact efuse device co...

MEMS DIAPHRAGM

METHOD FOR THE PROTECTION OF INFORMATION IN MULTI-PROJECT WAFERS

MICRO-ELECTROMECHANICAL SYSTEM MICROPHONE STRUCTURE AND METHOD OF F...

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

MICROELECTROMECHANICAL SYSTEM MICROPHONE

FLUID-CONFINING APPARATUS AND METHOD OF OPERATING THE SAME

METHOD OF CONTROLLING STATUSES OF WAFERS

METHOD FOR FORMING AN OPENING OF NANO-METER SCALE

METHOD FOR FORMING METAL FILM OR STACKED LAYER INCLUDING METAL FILM...

Expandable polishing platen device