Hulda AMINOFF

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Patents Grantslast 30 patents

Information Patent Grant
Precursor source arrangement and atomic layer deposition apparatus
- Patent number 12,000,043
- Issue date Jun 4, 2024
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 11,634,814
- Issue date Apr 25, 2023
- BENEQ GROUP OY
- Ville Miikkulainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20220259733
- Publication date Aug 18, 2022
- BENEQ OY
- Hulda AMINOFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR SOURCE ARRANGEMENT AND ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20220243328
- Publication date Aug 4, 2022
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR SOURCE ARRANGEMENT AND ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20220243320
- Publication date Aug 4, 2022
- BENEQ OY
- Hulda AMINOFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20220205098
- Publication date Jun 30, 2022
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20220205097
- Publication date Jun 30, 2022
- BENEQ OY
- Ville MIIKKULAINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...