TREA

Ichiro Shimizu

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  • Itami-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for dechucking a substrate
    • Patent number 7,160,392
    • Issue date Jan 9, 2007
    • Applied Materials, Inc.
    • Quanyuan Shang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for dechucking a substrate
    • Patent number 6,676,761
    • Issue date Jan 13, 2004
    • Applied Materials, Inc.
    • Quanyuan Shang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR DECHUCKING A SUBSTRATE
    • Publication number 20070062454
    • Publication date Mar 22, 2007
    • APPLIED MATERIALS, INC.
    • Quanyuan Shang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for dechucking a substrate
    • Publication number 20040089239
    • Publication date May 13, 2004
    • APPLIED MATERIALS, INC.
    • Quanyuan Shang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method and apparatus for dechucking a substrate
    • Publication number 20030079691
    • Publication date May 1, 2003
    • APPLIED MATERIALS, INC.
    • Quanyuan Shang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...