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Ikuyoshi Nakatani
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Kyoto, JP
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last 30 patents
Information
Patent Grant
Method and apparatus for measuring insulation film thickness of sem...
Patent number
5,568,252
Issue date
Oct 22, 1996
Dainippon Screen Manufacturing Co., Ltd.
Tatsufumi Kusuda
G01 - MEASURING TESTING
Information
Patent Grant
Optical gap measuring device using frustrated internal reflection
Patent number
5,239,183
Issue date
Aug 24, 1993
Dainippon Screen Mfg. Co., Ltd.
Motohiro Kouno
G01 - MEASURING TESTING
Information
Patent Grant
Method of and apparatus for measuring electric characteristics of s...
Patent number
5,233,291
Issue date
Aug 3, 1993
Dainippon Screen Mfg. Co., Ltd.
Motohiro Kouno
G01 - MEASURING TESTING
Information
Patent Grant
Gap measuring device and method using frustrated internal reflection
Patent number
5,225,690
Issue date
Jul 6, 1993
Dainippon Screen Mfg. Co., Ltd.
Takamasa Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Heat processing apparatus for semiconductor manufacturing
Patent number
4,803,948
Issue date
Feb 14, 1989
Dainippon Screen Mfg. Co., Ltd.
Keiji Nakagawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...