Number | Date | Country | Kind |
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5-350500 | Dec 1993 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4909631 | Tan et al. | Mar 1990 | |
5233291 | Kouno et al. | Aug 1993 |
Entry |
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C. J. Dell'Oca, "Nondestructive Thickness Determination of Polycrystalline Silicon Deposited on Oxidized Silicon", J. Electrochem. Soc.: Solid-State Science and Technology, Jan. 1972, pp. 108-111. |