Ilia Kalinovski

Person

Berkeley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for detecting oxygen in-situ in a substrate are...
- Patent number 10,267,728
- Issue date Apr 23, 2019
- Lam Research Corporation
- Dengliang Yang
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing method for depositing a barrier layer to preve...
- Patent number 10,109,476
- Issue date Oct 23, 2018
- Lam Research Corporation
- David Cheung
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Ultra low silicon loss high dose implant strip
- Patent number 9,564,344
- Issue date Feb 7, 2017
- Novellus Systems, Inc.
- David Cheung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Enhanced passivation process to protect silicon prior to high dose...
- Patent number 8,721,797
- Issue date May 13, 2014
- Novellus Systems, Inc.
- David Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist strip method for low-k dielectrics
- Patent number 8,058,178
- Issue date Nov 15, 2011
- Novellus Systems, Inc.
- Haruhiro Harry Goto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist strip method for low-k dielectrics
- Patent number 7,585,777
- Issue date Sep 8, 2009
- Novellus Systems, Inc.
- Haruhiro Harry Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist strip method for low-k dielectrics
- Patent number 7,288,484
- Issue date Oct 30, 2007
- Novellus Systems, Inc.
- Haruhiro Harry Goto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR DETECTING OXYGEN IN-SITU IN A SUBSTRATE ARE...
- Publication number 20180088031
- Publication date Mar 29, 2018
- LAM RESEARCH CORPORATION
- Dengliang Yang
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING METHOD FOR DEPOSITING A BARRIER LAYER TO PREVE...
- Publication number 20180005819
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- David Cheung
- C07 - ORGANIC CHEMISTRY
Information Patent Application
ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP
- Publication number 20150332933
- Publication date Nov 19, 2015
- Novellus Systems, Inc.
- David Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS
- Publication number 20120108072
- Publication date May 3, 2012
- Ivelin A. Angelov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED PASSIVATION PROCESS TO PROTECT SILICON PRIOR TO HIGH DOSE...
- Publication number 20110139175
- Publication date Jun 16, 2011
- David Cheung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP
- Publication number 20110143548
- Publication date Jun 16, 2011
- David Cheung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ilia Kalinovski

Person

Patents Grantslast 30 patents

Systems and methods for detecting oxygen in-situ in a substrate are...

Substrate processing method for depositing a barrier layer to preve...

Ultra low silicon loss high dose implant strip

Enhanced passivation process to protect silicon prior to high dose...

Photoresist strip method for low-k dielectrics

Photoresist strip method for low-k dielectrics

Photoresist strip method for low-k dielectrics

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR DETECTING OXYGEN IN-SITU IN A SUBSTRATE ARE...

SUBSTRATE PROCESSING METHOD FOR DEPOSITING A BARRIER LAYER TO PREVE...

ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP

SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS

ENHANCED PASSIVATION PROCESS TO PROTECT SILICON PRIOR TO HIGH DOSE...

ULTRA LOW SILICON LOSS HIGH DOSE IMPLANT STRIP