Ilias Iliopoulos

Person

San Bruno, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Determining susceptor service life in a plasma processing chamber
- Patent number 10,937,637
- Issue date Mar 2, 2021
- Applied Materials, Inc.
- Ilias Iliopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for identifying a clean endpoint time for a chamber
- Patent number 10,309,013
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber leak and gas contaimination detection
- Patent number 10,269,601
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Shuo Julia Na
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection of grounding strap breakage
- Patent number 10,002,748
- Issue date Jun 19, 2018
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Application of in-line glass edge-inspection and alignment check in...
- Patent number 9,704,762
- Issue date Jul 11, 2017
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detecting arcing using processing chamber data
- Patent number 9,653,269
- Issue date May 16, 2017
- Applied Materials, Inc.
- Shuo Na
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature uniformity measurement during thermal processing
- Patent number 8,109,669
- Issue date Feb 7, 2012
- Applied Materials, Inc.
- Wolfgang Aderhold
- G01 - MEASURING TESTING
Information Patent Grant
Feedback control of plasma-enhanced chemical vapor deposition proce...
- Patent number 6,913,938
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DETERMINING SUSCEPTOR SERVICE LIFE IN A PLASMA PROCESSING CHAMBER
- Publication number 20190066986
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER LEAK AND GAS CONTAIMINATION DETECTION
- Publication number 20170107610
- Publication date Apr 20, 2017
- Shuo Julia NA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION OF GROUNDING STRAP BREAKAGE
- Publication number 20150221484
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPLICATION OF IN-LINE GLASS EDGE-INSPECTION AND ALIGNMENT CHECK IN...
- Publication number 20150221563
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPLICATION OF IN-LINE THICKNESS METROLOGY AND CHAMBER MATCHING IN...
- Publication number 20150219565
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION OF SUBSTRATE DEFECTS BY TRACKING PROCESSING PARAMETERS
- Publication number 20150147830
- Publication date May 28, 2015
- Applied Materials, Inc.
- Ilias ILIOPOULOS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTING ARCING USING PROCESSING CHAMBER DATA
- Publication number 20150048862
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Shuo NA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR IDENTIFYING A CLEAN ENDPOINT TIME FOR A CHAMBER
- Publication number 20140279750
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Ilias Iliopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE UNIFORMITY MEASUREMENT DURING THERMAL PROCESSING
- Publication number 20100124249
- Publication date May 20, 2010
- Applied Materials, Inc.
- WOLFGANG ADERHOLD
- G01 - MEASURING TESTING
Information Patent Application
Integrated equipment set for forming a low K dielectric interconnec...
- Publication number 20040206621
- Publication date Oct 21, 2004
- Hongwen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Feedback control of plasma-enhanced chemical vapor deposition proce...
- Publication number 20030049390
- Publication date Mar 13, 2003
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ilias Iliopoulos

Person

Patents Grantslast 30 patents

Determining susceptor service life in a plasma processing chamber

Method and system for identifying a clean endpoint time for a chamber

Chamber leak and gas contaimination detection

Detection of grounding strap breakage

Application of in-line glass edge-inspection and alignment check in...

Detecting arcing using processing chamber data

Temperature uniformity measurement during thermal processing

Feedback control of plasma-enhanced chemical vapor deposition proce...

Patents Applicationslast 30 patents

DETERMINING SUSCEPTOR SERVICE LIFE IN A PLASMA PROCESSING CHAMBER

CHAMBER LEAK AND GAS CONTAIMINATION DETECTION

DETECTION OF GROUNDING STRAP BREAKAGE

APPLICATION OF IN-LINE GLASS EDGE-INSPECTION AND ALIGNMENT CHECK IN...

APPLICATION OF IN-LINE THICKNESS METROLOGY AND CHAMBER MATCHING IN...

DETECTION OF SUBSTRATE DEFECTS BY TRACKING PROCESSING PARAMETERS

DETECTING ARCING USING PROCESSING CHAMBER DATA

METHOD AND SYSTEM FOR IDENTIFYING A CLEAN ENDPOINT TIME FOR A CHAMBER

TEMPERATURE UNIFORMITY MEASUREMENT DURING THERMAL PROCESSING

Integrated equipment set for forming a low K dielectric interconnec...

Feedback control of plasma-enhanced chemical vapor deposition proce...