Inna Shmurun

Person

San Mateo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for exposing a substrate to UV radiation using...
- Patent number 8,597,011
- Issue date Dec 3, 2013
- Applied Materials, Inc.
- Andrzei Kaszuba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for exposing a substrate to UV radiation using...
- Patent number 7,909,595
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- Andrzei Kaszuba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning a CVD chamber
- Patent number 7,654,224
- Issue date Feb 2, 2010
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated gas box for PECVD applications
- Patent number 7,628,863
- Issue date Dec 8, 2009
- Applied Materials, Inc.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning a CVD chamber
- Patent number 7,500,445
- Issue date Mar 10, 2009
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning a CVD chamber
- Patent number 7,464,717
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Computer-readable medium that contains software for executing a met...
- Patent number 7,465,357
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated gas distribution plate for a processing chamber
- Patent number 6,946,033
- Issue date Sep 20, 2005
- Applied Materials Inc.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater/lift assembly for high temperature processing chamber
- Patent number 6,645,303
- Issue date Nov 11, 2003
- Applied Materials, Inc.
- Jonathan Frankel
- G07 - CHECKING-DEVICES
Information Patent Grant
Low profile thick film heaters in multi-slot bake chamber
- Patent number 6,506,994
- Issue date Jan 14, 2003
- Applied Materials, Inc.
- Yen-Kun Victor Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for distributing gases in a chemical vapor deposition system
- Patent number 6,495,233
- Issue date Dec 17, 2002
- Applied Materials, Inc.
- Inna Shmurun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for processing semiconductive wafers
- Patent number 6,300,255
- Issue date Oct 9, 2001
- Applied Materials, Inc.
- Shankar Venkataranan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for high temperature processing chamber
- Patent number 6,019,848
- Issue date Feb 1, 2000
- Applied Materials, Inc.
- Jonathan Frankel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20170121813
- Publication date May 4, 2017
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20140158048
- Publication date Jun 12, 2014
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO UV RADIATION USING...
- Publication number 20120003398
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- Andrzei Kaszuba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20100095891
- Publication date Apr 22, 2010
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20090145360
- Publication date Jun 11, 2009
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO UV RADIATION USING...
- Publication number 20070228618
- Publication date Oct 4, 2007
- Applied Materials, Inc.
- Andrzei Kaszuba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Heated gas box for PECVD applications
- Publication number 20070107660
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20060231205
- Publication date Oct 19, 2006
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20060225767
- Publication date Oct 12, 2006
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas box for PECVD applications
- Publication number 20060027165
- Publication date Feb 9, 2006
- APPLIED MATERIALS, INC.
- Soovo Sen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cleaning a CVD chamber
- Publication number 20040144490
- Publication date Jul 29, 2004
- APPLIED MATERIALS, INC.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Blocker plate bypass design to improve clean rate at the edge of th...
- Publication number 20040118519
- Publication date Jun 24, 2004
- APPLIED MATERIALS, INC.
- Soovo Sen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for operating a chemical vapor deposition chamber using a h...
- Publication number 20040052969
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas distribution plate for a processing chamber
- Publication number 20040050492
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW PROFILE THICK FILM HEATERS IN MULTI-SLOT BAKE CHAMBER
- Publication number 20020190051
- Publication date Dec 19, 2002
- APPLIED MATERIALS, INC.
- Yen-Kun Victor Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heater/lift assembly for high temperature processing chamber
- Publication number 20010054387
- Publication date Dec 27, 2001
- Jonathan Frankel
- G07 - CHECKING-DEVICES

Inna Shmurun

Person

Patents Grantslast 30 patents

Apparatus and method for exposing a substrate to UV radiation using...

Apparatus and method for exposing a substrate to UV radiation using...

Method and apparatus for cleaning a CVD chamber

Heated gas box for PECVD applications

Method and apparatus for cleaning a CVD chamber

Method for cleaning a CVD chamber

Computer-readable medium that contains software for executing a met...

Heated gas distribution plate for a processing chamber

Heater/lift assembly for high temperature processing chamber

Low profile thick film heaters in multi-slot bake chamber

Apparatus for distributing gases in a chemical vapor deposition system

Method and apparatus for processing semiconductive wafers

Lid assembly for high temperature processing chamber

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO UV RADIATION USING...

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO UV RADIATION USING...

Heated gas box for PECVD applications

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

Heated gas box for PECVD applications

Method and apparatus for cleaning a CVD chamber

Blocker plate bypass design to improve clean rate at the edge of th...

Methods for operating a chemical vapor deposition chamber using a h...

Heated gas distribution plate for a processing chamber

LOW PROFILE THICK FILM HEATERS IN MULTI-SLOT BAKE CHAMBER

Heater/lift assembly for high temperature processing chamber