Iqbal A. Shareef

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas mixer
- Patent number 11,532,460
- Issue date Dec 20, 2022
- Lam Research Corporation
- Mark Taskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distributor and flow verifier
- Patent number 10,943,769
- Issue date Mar 9, 2021
- Lam Research Corporation
- Mark Taskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid flow metrology for improved chamber matching
- Patent number 10,760,944
- Issue date Sep 1, 2020
- Lam Research Corporation
- Evangelos T. Spyropoulos
- G01 - MEASURING TESTING
Information Patent Grant
Gas supply delivery arrangement including a gas splitter for tunabl...
- Patent number 10,431,431
- Issue date Oct 1, 2019
- Lam Research Corporation
- Mark Taskar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Configuration independent gas delivery system
- Patent number 10,128,087
- Issue date Nov 13, 2018
- Lam Research Corporation
- Mark Taskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid mixing hub for semiconductor processing tool
- Patent number 10,022,689
- Issue date Jul 17, 2018
- Lam Research Corporation
- Iqbal A. Shareef
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods and apparatus for supplying process gas in a plasma process...
- Patent number 10,002,747
- Issue date Jun 19, 2018
- Lam Research Corporation
- Iqbal Shareef
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metrology method for transient gas flow
- Patent number 9,778,083
- Issue date Oct 3, 2017
- Lam Research Corporation
- Evangelos Spyropoulos
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Systems and methods for providing gases to a process chamber
- Patent number 9,721,763
- Issue date Aug 1, 2017
- Lam Research Corporation
- Iqbal Shareef
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for shaping a gas profile near bevel edge
- Patent number 9,721,782
- Issue date Aug 1, 2017
- Lam Research Corporation
- Jack Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion sensor retainer assembly apparatus and method for detecti...
- Patent number 9,704,761
- Issue date Jul 11, 2017
- Lam Research Corporation
- Mark Taskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic ceramic component of gas delivery system and method of m...
- Patent number 9,580,360
- Issue date Feb 28, 2017
- Lam Research Corporation
- John Daugherty
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Ultrasonic cleaning method and apparatus therefore
- Patent number 9,364,870
- Issue date Jun 14, 2016
- Lam Research Corporation
- Evangelos T. Spyropoulos
- B08 - CLEANING
Information Patent Grant
Cluster mass flow devices and multi-line mass flow devices incorpor...
- Patent number 9,335,768
- Issue date May 10, 2016
- Lam Research Corporation
- Mark Taskar
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
System and method for decreasing scrubber exhaust from gas delivery...
- Patent number 9,175,808
- Issue date Nov 3, 2015
- Lam Research Corporation
- Mark Taskar
- B08 - CLEANING
Information Patent Grant
Ultrasonic cleaning method and apparatus therefore
- Patent number 9,174,249
- Issue date Nov 3, 2015
- Lam Research Corporation
- Evangelos T. Spyropoulos
- B08 - CLEANING
Information Patent Grant
Gas supply systems for substrate processing chambers and methods th...
- Patent number 9,090,972
- Issue date Jul 28, 2015
- Lam Research Corporation
- Iqbal Shareef
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shared gas panels in plasma processing chambers employing multi-zon...
- Patent number 9,091,397
- Issue date Jul 28, 2015
- Lam Research Corporation
- Iqbal Shareef
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Methods and apparatus for displacing fluids from substrates using s...
- Patent number 9,004,086
- Issue date Apr 14, 2015
- Lam Research Corporation
- Ronda K. Nixon
- B08 - CLEANING
Information Patent Grant
Shared gas panels in plasma processing systems
- Patent number 8,851,113
- Issue date Oct 7, 2014
- Lam Research Coporation
- Mark Taskar
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Gas transport delay resolution for short etch recipes
- Patent number 8,794,267
- Issue date Aug 5, 2014
- Lam Research Corporation
- Iqbal Shareef
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for delivering a process gas
- Patent number 8,521,461
- Issue date Aug 27, 2013
- Lam Research Corporation
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Grant
Methods for controlling time scale of gas delivery into a processin...
- Patent number 8,340,827
- Issue date Dec 25, 2012
- Lam Research Corporation
- Gunsu Yun
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for delivering a process gas
- Patent number 8,150,646
- Issue date Apr 3, 2012
- Lam Research Corporation
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for shaping gas profile near bevel edge
- Patent number 7,981,307
- Issue date Jul 19, 2011
- Lam Research Corporation
- Jack Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for performing transient flow prediction and verification u...
- Patent number 7,881,886
- Issue date Feb 1, 2011
- Lam Research Corporation
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Grant
Methods for performing actual flow verification
- Patent number 7,822,570
- Issue date Oct 26, 2010
- Lam Research Corporation
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Grant
Heated chuck for laser thermal processing
- Patent number 7,731,798
- Issue date Jun 8, 2010
- Ultratech, Inc.
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser thermal processing chuck with a thermal compensating heater m...
- Patent number 7,326,877
- Issue date Feb 5, 2008
- Ultratech, Inc.
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat shield for thermal processing
- Patent number 7,176,405
- Issue date Feb 13, 2007
- Ultratech, Inc.
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
GAS BOX WITH CROSS-FLOW EXHAUST SYSTEM
- Publication number 20230238253
- Publication date Jul 27, 2023
- LAM RESEARCH CORPORATION
- Evangelos T. Spyropoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS MIXER
- Publication number 20210183626
- Publication date Jun 17, 2021
- LAM RESEARCH CORPORATION
- Mark Taskar
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
HYBRID FLOW METROLOGY FOR IMPROVED CHAMBER MATCHING
- Publication number 20200049547
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Evangelos T. SPYROPOULOS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS DISTRIBUTOR AND FLOW VERIFIER
- Publication number 20200027702
- Publication date Jan 23, 2020
- LAM RESEARCH CORPORATION
- Mark Taskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID MIXING HUB FOR SEMICONDUCTOR PROCESSING TOOL
- Publication number 20170021317
- Publication date Jan 26, 2017
- LAM RESEARCH CORPORATION
- Iqbal A. Shareef
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS SUPPLY DELIVERY ARRANGEMENT INCLUDING A GAS SPLITTER FOR TUNABL...
- Publication number 20160111258
- Publication date Apr 21, 2016
- LAM RESEARCH CORPORATION
- Mark Taskar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION SENSOR RETAINER ASSEMBLY APPARATUS AND METHOD FOR DETECTI...
- Publication number 20160076989
- Publication date Mar 17, 2016
- Lam Research Corporation
- Mark Taskar
- G01 - MEASURING TESTING
Information Patent Application
ULTRASONIC CLEANING METHOD AND APPARATUS THEREFORE
- Publication number 20160045941
- Publication date Feb 18, 2016
- LAM RESEARCH CORPORATION
- Evangelos T. Spyropoulos
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING GASES TO A PROCESS CHAMBER
- Publication number 20150303035
- Publication date Oct 22, 2015
- LAM RESEARCH CORPORATION
- Iqbal Shareef
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC CERAMIC COMPONENT OF GAS DELIVERY SYSTEM AND METHOD OF M...
- Publication number 20150287572
- Publication date Oct 8, 2015
- LAM RESEARCH CORPORATION
- John Daugherty
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
CONFIGURATION INDEPENDENT GAS DELIVERY SYSTEM
- Publication number 20150287573
- Publication date Oct 8, 2015
- LAM RESEARCH CORPORATION
- Mark Taskar
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ANNULAR BAFFLE FOR PUMPING FROM ABOVE A PLANE OF THE SEMICONDUCTOR...
- Publication number 20150155187
- Publication date Jun 4, 2015
- LAM RESEARCH CORPORATION
- Iqbal Shareef
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clutter Mass Flow Devices and Multi-Line Mass Flow Devices Incorpor...
- Publication number 20150068613
- Publication date Mar 12, 2015
- LAM RESEARCH CORPORATION
- Mark Taskar
- G05 - CONTROLLING REGULATING
Information Patent Application
METROLOGY METHOD FOR TRANSIENT GAS FLOW
- Publication number 20140343875
- Publication date Nov 20, 2014
- LAM RESEARCH CORPORATION
- Evangelos Spyropoulos
- G01 - MEASURING TESTING
Information Patent Application
GAS SUPPLY SYSTEMS FOR SUBSTRATE PROCESSING CHAMBERS AND METHODS TH...
- Publication number 20140182689
- Publication date Jul 3, 2014
- LAM RESEARCH CORPORATION
- Iqbal Shareef
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRASONIC CLEANING METHOD AND APPARATUS THEREFORE
- Publication number 20140158153
- Publication date Jun 12, 2014
- LAM RESEARCH CORPORATION
- Evangelos T. Spyropoulos
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZON...
- Publication number 20130255782
- Publication date Oct 3, 2013
- Iqbal Shareef
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
SHARED GAS PANELS IN PLASMA PROCESSING SYSTEMS
- Publication number 20130255781
- Publication date Oct 3, 2013
- Mark Taskar
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND APPARATUS FOR SUPPLYING PROCESS GAS IN A PLASMA PROCESS...
- Publication number 20130255883
- Publication date Oct 3, 2013
- Iqbal A. Shareef
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR DECREASING SCRUBBER EXHAUST FROM GAS DELIVERY...
- Publication number 20120318362
- Publication date Dec 20, 2012
- Mark Taskar
- B08 - CLEANING
Information Patent Application
APPARATUS FOR DELIVERING A PROCESS GAS
- Publication number 20120247581
- Publication date Oct 4, 2012
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR DISPLACING FLUIDS FROM SUBSTRATES USING S...
- Publication number 20120111379
- Publication date May 10, 2012
- Ronda K. Nixon
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR SHAPING A GAS PROFILE NEAR BEVEL EDGE
- Publication number 20110232566
- Publication date Sep 29, 2011
- Jack Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DELIVERING A PROCESS GAS
- Publication number 20110029268
- Publication date Feb 3, 2011
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Application
GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES
- Publication number 20110005601
- Publication date Jan 13, 2011
- LAM RESEARCH CORPORATION
- Iqbal Shareef
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CONTROLLING TIME SCALE OF GAS DELIVERY INTO A PROCESSIN...
- Publication number 20090319071
- Publication date Dec 24, 2009
- Gunsu Yun
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR SHAPING GAS PROFILE NEAR BEVEL EDGE
- Publication number 20090084758
- Publication date Apr 2, 2009
- Jack Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PERFORMING ACTUAL FLOW VERIFICATION
- Publication number 20080115560
- Publication date May 22, 2008
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Application
Laser thermal processing chuck with a thermal compensating heater m...
- Publication number 20070004232
- Publication date Jan 4, 2007
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heat shield for thermal processing
- Publication number 20060237403
- Publication date Oct 26, 2006
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Iqbal A. Shareef

Person

Patents Grantslast 30 patents

Gas mixer

Gas distributor and flow verifier

Hybrid flow metrology for improved chamber matching

Gas supply delivery arrangement including a gas splitter for tunabl...

Configuration independent gas delivery system

Fluid mixing hub for semiconductor processing tool

Methods and apparatus for supplying process gas in a plasma process...

Metrology method for transient gas flow

Systems and methods for providing gases to a process chamber

Method and apparatus for shaping a gas profile near bevel edge

Corrosion sensor retainer assembly apparatus and method for detecti...

Monolithic ceramic component of gas delivery system and method of m...

Ultrasonic cleaning method and apparatus therefore

Cluster mass flow devices and multi-line mass flow devices incorpor...

System and method for decreasing scrubber exhaust from gas delivery...

Ultrasonic cleaning method and apparatus therefore

Gas supply systems for substrate processing chambers and methods th...

Shared gas panels in plasma processing chambers employing multi-zon...

Methods and apparatus for displacing fluids from substrates using s...

Shared gas panels in plasma processing systems

Gas transport delay resolution for short etch recipes

Apparatus for delivering a process gas

Methods for controlling time scale of gas delivery into a processin...

Methods for delivering a process gas

Method and apparatus for shaping gas profile near bevel edge

Methods for performing transient flow prediction and verification u...

Methods for performing actual flow verification

Heated chuck for laser thermal processing

Laser thermal processing chuck with a thermal compensating heater m...

Heat shield for thermal processing

Patents Applicationslast 30 patents

GAS BOX WITH CROSS-FLOW EXHAUST SYSTEM

GAS MIXER

HYBRID FLOW METROLOGY FOR IMPROVED CHAMBER MATCHING

GAS DISTRIBUTOR AND FLOW VERIFIER

FLUID MIXING HUB FOR SEMICONDUCTOR PROCESSING TOOL

GAS SUPPLY DELIVERY ARRANGEMENT INCLUDING A GAS SPLITTER FOR TUNABL...

CORROSION SENSOR RETAINER ASSEMBLY APPARATUS AND METHOD FOR DETECTI...

ULTRASONIC CLEANING METHOD AND APPARATUS THEREFORE

SYSTEMS AND METHODS FOR PROVIDING GASES TO A PROCESS CHAMBER

MONOLITHIC CERAMIC COMPONENT OF GAS DELIVERY SYSTEM AND METHOD OF M...

CONFIGURATION INDEPENDENT GAS DELIVERY SYSTEM

ANNULAR BAFFLE FOR PUMPING FROM ABOVE A PLANE OF THE SEMICONDUCTOR...

Clutter Mass Flow Devices and Multi-Line Mass Flow Devices Incorpor...

METROLOGY METHOD FOR TRANSIENT GAS FLOW

GAS SUPPLY SYSTEMS FOR SUBSTRATE PROCESSING CHAMBERS AND METHODS TH...

ULTRASONIC CLEANING METHOD AND APPARATUS THEREFORE

SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZON...

SHARED GAS PANELS IN PLASMA PROCESSING SYSTEMS

METHODS AND APPARATUS FOR SUPPLYING PROCESS GAS IN A PLASMA PROCESS...

SYSTEM AND METHOD FOR DECREASING SCRUBBER EXHAUST FROM GAS DELIVERY...

APPARATUS FOR DELIVERING A PROCESS GAS

METHODS AND APPARATUS FOR DISPLACING FLUIDS FROM SUBSTRATES USING S...

METHOD AND APPARATUS FOR SHAPING A GAS PROFILE NEAR BEVEL EDGE

METHODS FOR DELIVERING A PROCESS GAS

GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES

METHODS FOR CONTROLLING TIME SCALE OF GAS DELIVERY INTO A PROCESSIN...

METHOD AND APPARATUS FOR SHAPING GAS PROFILE NEAR BEVEL EDGE

METHODS FOR PERFORMING ACTUAL FLOW VERIFICATION

Laser thermal processing chuck with a thermal compensating heater m...

Heat shield for thermal processing