Isamu Sakuragi

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Bevel/backside polymer removing method and device, substrate proces...
- Patent number 8,821,644
- Issue date Sep 2, 2014
- Tokyo Electron Limited
- Isamu Sakuragi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method, substrate processing system, and compu...
- Patent number 8,187,981
- Issue date May 29, 2012
- Tokyo Electron Limited
- Kazuhiro Tomioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for detecting an end point of resist peeling, method and app...
- Patent number 8,021,564
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Isamu Sakuragi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090188428
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Isamu SAKURAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHECKING SUBSTRATE EDGE PROCESSING APPARATUS
- Publication number 20090188892
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Kumiko Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEVEL/BACKSIDE POLYMER REMOVING METHOD AND DEVICE, SUBSTRATE PROCES...
- Publication number 20090143894
- Publication date Jun 4, 2009
- TOKYO ELECTRON LIMITED
- Isamu SAKURAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...
- Publication number 20090014414
- Publication date Jan 15, 2009
- TOKYO ELECTRON LIMITED
- Kazuhiro Tomioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETECTING AN END POINT OF RESIST PEELING, METHOD AND APP...
- Publication number 20080083500
- Publication date Apr 10, 2008
- TOKYO ELECTRON LIMITED
- Isamu SAKURAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING SYSTEM CONTAINING A HOT FILAMENT HYDROGEN RADICAL SOURCE...
- Publication number 20080078325
- Publication date Apr 3, 2008
- TOKYO ELECTRON LIMITED
- Tsukasa Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF INTEGRATED SUBSTRATED PROCESSING USING A HOT FILAMENT HYD...
- Publication number 20080081464
- Publication date Apr 3, 2008
- TOKYO ELECTRON LIMITED
- Tsukasa Matsuda
- H01 - BASIC ELECTRIC ELEMENTS

Isamu Sakuragi

Person

Patents Grantslast 30 patents

Bevel/backside polymer removing method and device, substrate proces...

Substrate processing method, substrate processing system, and compu...

Method for detecting an end point of resist peeling, method and app...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

METHOD OF CHECKING SUBSTRATE EDGE PROCESSING APPARATUS

BEVEL/BACKSIDE POLYMER REMOVING METHOD AND DEVICE, SUBSTRATE PROCES...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPU...

METHOD FOR DETECTING AN END POINT OF RESIST PEELING, METHOD AND APP...

PROCESSING SYSTEM CONTAINING A HOT FILAMENT HYDROGEN RADICAL SOURCE...

METHOD OF INTEGRATED SUBSTRATED PROCESSING USING A HOT FILAMENT HYD...