Isao Nagahashi

Person

Fujisawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer polishing method and apparatus
- Patent number RE37622
- Issue date Apr 2, 2002
- SpeedFam-IPEC Corporation
- Chris E. Karlsrud
- 451 - Abrading
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 6,089,959
- Issue date Jul 18, 2000
- System Seiko Co., Ltd.
- Isao Nagahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with improved product unloading
- Patent number 5,762,543
- Issue date Jun 9, 1998
- Speedfam Corporation
- Karl Kasprzyk
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device
- Patent number 5,645,472
- Issue date Jul 8, 1997
- Speedfam Company Limited
- Isao Nagahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,196
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,199
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,329,732
- Issue date Jul 19, 1994
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Specular machining apparatus for peripheral edge portion of wafer
- Patent number 5,097,630
- Issue date Mar 24, 1992
- Speedfam Co., Ltd.
- Seiichi Maeda
- B24 - GRINDING POLISHING
Information Patent Grant
Edge polisher
- Patent number 5,094,037
- Issue date Mar 10, 1992
- Speedfam Company, Ltd.
- Shunji Hakomori
- B24 - GRINDING POLISHING
Information Patent Grant
Flat lapping machine
- Patent number 4,805,348
- Issue date Feb 21, 1989
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING

Isao Nagahashi

Person

Patents Grantslast 30 patents

Wafer polishing method and apparatus

Polishing method and polishing apparatus

Polishing apparatus with improved product unloading

Polishing device

Wafer polishing method and apparatus

Wafer polishing method and apparatus

Wafer polishing method and apparatus

Specular machining apparatus for peripheral edge portion of wafer

Edge polisher

Flat lapping machine