Isao Yamada

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,449,844
- Issue date Sep 20, 2016
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle separation apparatus and charged particle bombardm...
- Patent number 8,168,946
- Issue date May 1, 2012
- Tokyo Electron Limited
- Masaki Narushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra precise polishing method and ultra precise polishing apparatus
- Patent number 7,420,189
- Issue date Sep 2, 2008
- Olympus Corporation
- Tomonori Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Production method of SiC monitor wafer
- Patent number 7,022,545
- Issue date Apr 4, 2006
- Mitsui Engineering & Shipbuilding Co., Ltd.
- Isao Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming gas cluster and method for forming thin film
- Patent number 6,797,334
- Issue date Sep 28, 2004
- Research Development Corporation of Japan
- Makoto Akizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film with a gas cluster ion beam
- Patent number 6,797,339
- Issue date Sep 28, 2004
- Research Development Corporation of Japan
- Makoto Akizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transparent conductive film and process for producing the film
- Patent number 6,641,937
- Issue date Nov 4, 2003
- Agency of Industrial Science & Technology
- Masato Kiuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam smoother apparatus
- Patent number 6,486,478
- Issue date Nov 26, 2002
- Epion Corporation
- Bruce K. Libby
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing group III nitride compound semiconductor l...
- Patent number 6,486,068
- Issue date Nov 26, 2002
- Toyoda Gosei Co., Ltd.
- Shiro Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming carbonaceous hard film
- Patent number 6,416,820
- Issue date Jul 9, 2002
- Epion Corporation
- Isao Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron doping by decaborane
- Patent number 6,013,332
- Issue date Jan 11, 2000
- Fujitsu Limited
- Kenichi Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for surface treatment with extra-low-speed ion beam
- Patent number 5,459,326
- Issue date Oct 17, 1995
- Research Development Corporation of Japan
- Isao Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming mirror for electromagnetic radiations of short wa...
- Patent number 5,198,262
- Issue date Mar 30, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Isao Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High energy ultraviolet laser reflector grown on a single crystalli...
- Patent number 5,042,887
- Issue date Aug 27, 1991
- Epion Corporation
- Isao Yamada
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
PLANARIZATION METHOD, SUBSTRATE TREATMENT SYSTEM, MRAM MANUFACTURIN...
- Publication number 20160035584
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Kenichi HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20140083976
- Publication date Mar 27, 2014
- TOKYO ELECTRON LIMITED
- Noriaki TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20130075248
- Publication date Mar 28, 2013
- Hyogo Prefecture
- Kenichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE PROCESSING METHOD AND SURFACE PROCESSING APPARATUS
- Publication number 20120128892
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Noriaki TOYODA
- C30 - CRYSTAL GROWTH
Information Patent Application
CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20120125889
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Noriaki TOYODA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...
- Publication number 20100320380
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- MASAKI NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...
- Publication number 20100319545
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- MASAKI NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultra precise polishing method and ultra precise polishing apparatus
- Publication number 20070227879
- Publication date Oct 4, 2007
- Olympus Corporation
- Tomonori Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Production method of sic monitor wafer
- Publication number 20050042800
- Publication date Feb 24, 2005
- MITSUI ENGINEERING & SHIPPING CO LTD
- Isao Yamada
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for forming gas cluster and method for forming thin film
- Publication number 20040037970
- Publication date Feb 26, 2004
- Makoto Akizuki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method for forming thin film with a gas cluster ion beam
- Publication number 20030143340
- Publication date Jul 31, 2003
- Makoto Akizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming carbonaceous hard films
- Publication number 20030026990
- Publication date Feb 6, 2003
- Isao Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for forming gas cluster and method for forming thin film
- Publication number 20020068128
- Publication date Jun 6, 2002
- Makoto Akizuki
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Method for forming thin film with a gas cluster ion beam
- Publication number 20020015803
- Publication date Feb 7, 2002
- Makoto Akizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING GROUP III NITRIDE COMPOUND SEMICONDUCTOR L...
- Publication number 20020006726
- Publication date Jan 17, 2002
- SHIRO YAMASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming gas cluster and method for forming thin film
- Publication number 20010010835
- Publication date Aug 2, 2001
- Makoto Akizuki
- C07 - ORGANIC CHEMISTRY

Isao Yamada

Person

Patents Grantslast 30 patents

Etching method, etching apparatus, and storage medium

Charged particle separation apparatus and charged particle bombardm...

Ultra precise polishing method and ultra precise polishing apparatus

Production method of SiC monitor wafer

Method for forming gas cluster and method for forming thin film

Method for forming thin film with a gas cluster ion beam

Transparent conductive film and process for producing the film

Gas cluster ion beam smoother apparatus

Method for manufacturing group III nitride compound semiconductor l...

Method for forming carbonaceous hard film

Boron doping by decaborane

Method for surface treatment with extra-low-speed ion beam

Method of forming mirror for electromagnetic radiations of short wa...

High energy ultraviolet laser reflector grown on a single crystalli...

Patents Applicationslast 30 patents

PLANARIZATION METHOD, SUBSTRATE TREATMENT SYSTEM, MRAM MANUFACTURIN...

CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...

ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM

SURFACE PROCESSING METHOD AND SURFACE PROCESSING APPARATUS

CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS,...

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...

Ultra precise polishing method and ultra precise polishing apparatus

Production method of sic monitor wafer

Method for forming gas cluster and method for forming thin film

Method for forming thin film with a gas cluster ion beam

Method for forming carbonaceous hard films

Method for forming gas cluster and method for forming thin film

Method for forming thin film with a gas cluster ion beam

METHOD FOR MANUFACTURING GROUP III NITRIDE COMPOUND SEMICONDUCTOR L...

Method for forming gas cluster and method for forming thin film